Ozone gas generation unit and ozone gas supply system

ABSTRACT

In the present invention, a gas pipe integrated block has a plurality of internal pipe paths. The plurality of internal pipe paths are connected to an ozone generator, control means, a raw gas supply port, an ozone gas output port, and cooling water inlet/outlet ports, to thereby form a unit in which a raw gas input pipe path and an ozone gas output pipe path are integrated. The raw gas input pipe path extends from the raw gas supply port through an automatic pressure controller to the ozone generator. The ozone gas output pipe path extends from the ozone generator through a gas filter, an ozone concentration meter, and a flow rate controller, to the ozone gas output port.

CROSS-REFERENCES TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.13/508,233, which is the National Stage of the International PatentApplication No. PCT/JP2010/065210, filed Sep. 6, 2010, the disclosuresof which are incorporated herein by reference in their entireties. Thisapplication claims priority to International Application No.PCT/JP2009/069952, filed Nov. 26, 2009, the disclosure of which isincorporated herein by reference in its entirety.

TECHNICAL FIELD

The present invention relates to an ozone gas supply system capable ofincreasing the quality of a raw gas supplied thereto, increasing thequality of an ozone gas outputted therefrom, and supplying a stableozone gas to a plurality of ozone treatment apparatuses by controllingthe flow rate and the concentration of the gas.

BACKGROUND ART

In a case of supplying an ozone gas to a multiple ozone treatmentapparatus including a plurality of ozone treatment apparatuses, it isgenerally conceivable to build an ozone gas supply system in which aplurality of ozone generation mechanisms (means) each including an ozonepower source, a flow rate controller (MFC), and the like, are providedcorresponding to the plurality of ozone treatment apparatuses,respectively, so that the ozone generation mechanisms independentlysupply an ozone gas to the corresponding ozone treatment apparatuses. Araw gas such as a high-purity oxygen gas having a purity of 99.99% and adew point of −70° C. or lower is supplied to an ozone generator of eachozone generation mechanism.

More specifically, in the ozone gas supply system, an ozone powersource, a raw gas pipe system line, an output gas pipe system line, andthe like, are provided, and the number of each of them is equal to thenumber of system lines included in the multiple ozone treatmentapparatus. The raw gas pipe system line supplies a raw gas such as ahigh-purity oxygen gas having a purity of 99.99% and a dew point of −70°C. or lower to the ozone generator via flow rate adjusting means such asan MFC for controlling a flow rate of the ozone gas or the raw gas. Theoutput gas pipe system line includes pressure adjusting means such as anautomatic pressure controller (APC) for controlling gas atmospherepressure in the ozone generator, an ozone concentration detector fordetecting a concentration of the ozone gas outputted from the ozonegenerator, and an ozone flow meter.

In a case of supplying an ozone gas to a multiple ozone treatmentapparatus including a plurality of ozone treatment apparatuses, it isgenerally conceivable to build an ozone gas supply system in which aplurality of ozone generation mechanisms each including an ozone powersource, a flow rate controller (MFC), and the like, are providedcorresponding to the plurality of ozone treatment apparatuses,respectively, so that the ozone generation mechanisms independentlysupply an ozone gas to the corresponding ozone treatment apparatuses.

More specifically, in the ozone gas supply system, an ozone generator,an ozone power source, a raw gas pipe system line, an output gas pipesystem line, and the like, are provided, and the number of each of themis equal to the number of system lines included in the multiple ozonetreatment apparatus. The raw gas pipe system line supplies a raw gas tothe ozone generator via an MFC or the like for controlling a flow rateof the raw gas. The output gas pipe system line includes an ozoneconcentration detector for detecting a concentration of the ozone gasoutputted from the ozone generator, and an ozone flow meter.

A very large space is required for building an ozone generation systemcompatible with such a multiple ozone treatment apparatus, and moreover,a still larger system configuration is required for building a systemthat supplies an ozone gas while coordinately controlling the multipleozone treatment apparatus. Thus, there are problems of costs, aninstallation space, and the like, to cause many disadvantages in apractical use.

Therefore, in a conventional method for ozone supply to a multiple ozonetreatment apparatus, an ozone gas supply system is adopted in which thecapacity of a single-type ozone generator is increased and a pipe systemline for outputting an ozone gas is divided into a plurality of pipes,so that an ozone gas having a predetermined flow rate and apredetermined concentration is stepwise outputted to a multiple ozonetreatment apparatus, as disclosed in Patent Document 1, for example.

FIG. 24 is a block diagram showing an internal configuration of aconventional ozone gas supply system 70, which can be simulated based onthe disclosure of the Patent Document 1.

FIG. 24 shows an ozone generator 71, an ozone power source 72, a raw gaspipe system line, and an output gas pipe system line. The raw gas pipesystem line supplies a raw gas to the ozone generator 71 via a flow ratecontroller (MFC) 73 for controlling a flow rate of the raw gas and apressure meter 62 for monitoring pressure in the generator. A part ofthe output gas pipe system line subsequent to an output pipe having avalve switch 61, an ozone concentration meter 75, and an ozone flowmeter 67, is divided into a plurality of pipes. The valve switch 61adjusts opening/closing of a valve depending on a pressure fluctuationin the ozone generator 71. Additionally, in the ozone gas supply system70, individual ozone-gas flow rate controllers (MFC) 68-1 to 68-n areprovided to the divided parts of the output gas pipe system line,respectively, so that the ozone gas can be independently supplied to aplurality of ozone treatment apparatuses 12-1 to 12-n that are providedcorresponding to the individual MFCs 68-1 to 68-n, respectively. Anamount of ozone gas exceeding the amount to be supplied by theindividual MFCs 68-1 to 68-n is discharged by a flow rate discharge unit69.

PRIOR-ART DOCUMENTS Patent Documents

-   Patent Document 1: National Publication of Translation No.    2009-500855 (FIG. 2, FIG. 3, FIG. 5)

The conventional ozone gas supply system for the ozone supply to amultiple ozone treatment apparatus is configured as described above. Inthe configuration, the raw gas is supplied to the ozone generator, andan ozone gas is outputted from a single ozone generator 71, and anoutputting pipe system line is divided into distribution pipes.Therefore, it is necessary that the ozone gas is supplied to themultiple ozone treatment apparatus (ozone treatment apparatuses 12-1 to12-n) while the flow rate and the ozone concentration of the ozone gasare kept constant. Accordingly, an ozone supply condition is only onecondition that is common to the respective ozone treatment apparatuses.Thus, there is a problem that it is impossible to variably control theflow rate and the concentration of the ozone gas independently for eachof the plurality of ozone treatment apparatuses.

Additionally, the ozone gas is supplied from the single ozone generatorto the multiple ozone treatment apparatus. Accordingly, if the ozonegenerator breaks down, the ozone gas supply to all the ozone treatmentapparatuses is stopped. Thus, there is a problem that the reliability ofthe ozone gas supply is low.

Moreover, as shown in FIG. 24, the ozone generator 71, the ozone powersource 72, and the gas pipe system are separate. Therefore, an ozonegeneration part including the ozone generator 71, the ozone power source72, and the gas pipe system occupies a large space. This arises aproblem that it is, in practical use, very difficult to build an ozonegas supply system having a plurality of such ozone generation parts, andalso a problem that the maintainability of the ozone generation part ispoor.

SUMMARY OF THE INVENTION Problems to be Solved by the Invention

The present invention has been made to solve the above-describedproblems, and an object of the present invention is to provide adownsized ozone generation unit and an ozone gas supply system includinga plurality of such ozone generation units, the ozone generation unitincluding various functions concerning a raw gas supply and an ozonegeneration, such as an ozone generator, an ozone power source, and a gaspipe system, and a function for outputting a generated ozone gas

Means for Solving the Problems

An ozone generation unit according to the present invention is an ozonegeneration unit for supplying, to an ozone treatment apparatus, an ozonegas having been set to a predetermined supply flow rate and apredetermined concentration. The ozone generation unit includes: anozone generator for generating an ozone gas; an ozone power source forcontrolling power to be supplied to the ozone generator; and controlmeans associated with the ozone generator. The control means includes atleast two means among: flow-rate-detection/flow-rate-adjustment meansincluding a mass flow controller for controlling a flow rate of a rawgas that is inputted to the ozone generator; gas filter means forprocessing the ozone gas outputted from the ozone generator so as toremove an impurity and a foreign substance therefrom;pressure-detection/pressure-adjustment means including an automaticpressure controller for automatically controlling internal pressure thatis pressure in the ozone generator; and ozone concentration detectionmeans including an ozone concentration meter for detecting an ozoneconcentration value of the ozone gas outputted from the ozone generator.The ozone generation unit further includes: a raw gas supply port forsupplying the raw gas from the outside to the ozone generator; an ozonegas output port for outputting, to the outside, the ozone gas obtainedfrom the ozone generator through at least part of the control means; andcooling water inlet/outlet ports for supplying and discharging a coolingwater obtained from the outside to the ozone generator. The ozonegeneration unit is formed as an integrated structure in which the ozonegenerator, the ozone power source, the control means, the raw gas supplyport, the ozone gas output port, and the cooling water inlet/outletports are assembled together.

Effects of the Invention

In the ozone generation unit of the present invention, the ozonegenerator, the ozone power source, the control means (at least two meansamong the flow-rate-detection/flow-rate-adjustment means, the gas filtermeans, the pressure-detection/pressure-adjustment means, and the ozoneconcentration detection means), the raw gas supply port, the ozone gasoutput port, and the cooling water inlet/outlet ports are assembledtogether into an integrated structure. This can achieve considerabledownsizing as compared with a conventional, similar configuration.

These and other objects, features, aspects and advantages of the presentinvention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 A block diagram showing a configuration of an ozone gas supplysystem according to an embodiment 1 of the present invention.

FIG. 2 An explanatory diagram showing an internal configuration of anozone gas output flow rate management unit of the ozone gas supplysystem shown in FIG. 1.

FIG. 3 An explanatory diagram schematically showing a display state of amain control panel of the ozone gas supply system according to theembodiment 1.

FIG. 4 A block diagram showing a configuration of an ozone control partincluded in an ozone generation unit shown in FIG. 1.

FIG. 5 An explanatory diagram schematically showing memory contents of adata memory included in the ozone generation unit shown in FIG. 1.

FIG. 6 A graph showing an output concentration control waveform forperforming an output concentration control on the ozone generation unitshown in FIG. 1.

FIG. 7 A graph showing received power of an ozone power source includedin a single ozone generation unit, and ozone concentrationcharacteristics of ozone occurring in an ozone generator.

FIG. 8 A circuit diagram showing details of an internal configuration ofan ozone power source provided in an ozone generation unit according toan embodiment 2.

FIG. 9 A perspective view schematically showing a combined structure ofthe ozone generation unit according to the embodiment 2.

FIG. 10 An explanatory diagram showing an internal configuration of anozone gas output flow rate management unit according to an embodiment 3,which is included in the ozone gas supply system shown in FIG. 1.

FIG. 11 A perspective view schematically showing a combined structure ofan ozone generation unit according to the embodiment 3.

FIG. 12 A block diagram showing a configuration of an ozone gas supplysystem according to an embodiment 4 of the present invention.

FIG. 13 A block diagram showing a configuration of an ozone gas supplysystem according to an embodiment 5 of the present invention.

FIG. 14 A perspective view schematically showing a combined structure ofan ozone generation unit according to the embodiment 5.

FIG. 15 A block diagram showing a configuration of an ozone gas supplysystem according to an embodiment 6 of the present invention.

FIG. 16 A perspective view schematically showing a combined structure ofthe ozone generation unit according to the embodiment 6.

FIG. 17 A block diagram showing another configuration of the ozone gassupply system according to the embodiment 6 of the present invention.

FIG. 18 A perspective view schematically showing another combinedstructure of the ozone generation unit according to the embodiment 6.

FIG. 19 A block diagram showing a configuration of an ozone gas supplysystem according to an embodiment 7 of the present invention.

FIG. 20 A block diagram showing a configuration of an ozone gas supplysystem according to an embodiment 8 of the present invention.

FIG. 21 A perspective view schematically showing a combined structure ofan ozone generation unit according to the embodiment 8.

FIG. 22 A block diagram showing another configuration of the ozone gassupply system according to the embodiment 6 of the present invention.

FIG. 23 A perspective view schematically showing another combinedstructure of the ozone generation unit according to the embodiment 6.

FIG. 24 A block diagram showing an internal configuration of aconventional ozone gas supply system 70.

FIG. 25 An explanatory diagram schematically showing a conventionalconfiguration corresponding to the ozone generation unit of theembodiment 2.

FIG. 26 An explanatory diagram showing the relationship between a dewpoint of a raw gas and a moisture content in the raw gas.

EMBODIMENT FOR CARRYING OUT THE INVENTION Embodiment 1

Hereinafter, an embodiment 1 of the present invention will be describedwith reference to FIGS. 1 to 6. FIGS. 1 to 6 will be briefly describedas follows. FIG. 1 is a block diagram showing a configuration of anozone gas supply system according to the embodiment 1 of the presentinvention. FIG. 2 is an explanatory diagram showing an internalconfiguration of an ozone gas output flow rate management unit of theozone gas supply system shown in FIG. 1. FIG. 3 is an explanatorydiagram schematically showing a display state of a main control panel ofthe ozone gas supply system according to the embodiment 1. FIG. 4 is ablock diagram showing a configuration of an ozone control part includedin an ozone generation unit shown in FIG. 1. FIG. 5 is an explanatorydiagram schematically showing memory contents (such as initialconditions of the ozone generation unit for controlling theconcentration and the flow rate) of a data memory included in the ozonegeneration unit shown in FIG. 1. FIG. 6 is a graph showing an outputconcentration control waveform for performing an output concentrationcontrol on the ozone generation unit 7 shown in FIG. 1.

(Overall Configuration)

As shown in FIG. 1, an ozone gas supply system 10 has n (≧2) ozonegeneration units 7-1 to 7-n included therein. In the following, amongthe ozone generation units 7-1 to 7-n, the ozone generation unit 7-2will be taken as a representative, and an internal configuration thereofwill be described with reference mainly to FIG. 1.

The interior of an ozone generator 1 is filled with a gas containing anoxygen gas. An ozone power source 2 included in the ozone gas supplysystem 10 applies high frequency high voltages HV and LV acrosselectrodes in the ozone generator 1, thus causing dielectric-barrierdischarge (silent discharge) between these electrodes. Thereby, a gasexisting in a discharge space generates an ozone gas due to thedischarging. The ozone power source 2 includes a converter 2 a, aninverter 2 b, and a high voltage circuit part 2 c, which will bedescribed in detail later.

In this embodiment, as a structure of the ozone generator 1, an ozonegenerator structured to employ the silent discharge is described as arepresentative. Here, for an ozone generation function, there may beadopted an ozone generator structured to employ creeping discharge orglow discharge, an ozone generator structured to employ super-highfrequency or microwave discharge, or an ozone generator employingelectrolytic medium. These ozone generators may be adopted.

A raw gas having a predetermined raw gas flow rate Q is obtained througha raw gas supply port 14 of the ozone gas supply system 10 and a raw gassupply port 14-2 of the ozone generation unit 7-2, and supplied to theozone generator 1 with a constant flow rate through a gas flow ratecontroller (MFC) 3.

An ozone generator system is equipped with, as means for keeping thepressure in the ozone generator 1 constant, means for detecting a gaspressure in the generator and a function for finely adjusting the amountof ozone gas outputted by the generator thus detected and therebykeeping the pressure in the ozone generator 1 constant. One of methodstherefor is implemented by an automatic pressure adjuster (APC) 4 forautomatically adjusting the pressure in the generator to a predeterminedpressure. The automatic pressure adjuster (APC) 4 is provided in anozone gas output pipe gas line of the ozone generator.

A specific configuration of the ozone gas output pipe gas line is asfollows. An ozone gas generated in the ozone generator 1 passes througha gas filter 51 for removing impurities and foreign substancestherefrom, and then through an ozone concentration meter 5 and theautomatic pressure adjuster (APC) 4 for automatically adjusting thepressure in the generator to a predetermined pressure. Thereby, theozone (ozonized oxygen) gas having a predetermined ozone concentration Cis continuously outputted from the ozone gas output port 15-2 to theoutside of the ozone generation unit 7-2.

Sometimes, an ozone-gas flow rate controller (MFC) for keeping the flowrate of the output ozone gas constant is provided in the ozone gasoutput pipe gas line. In this embodiment, no ozone-gas flow ratecontroller (MFC) is provided.

Accordingly, a flow rate Qx of the output ozone gas is the sum of anozone flow rate Qc and an flow rate Qn. The ozone flow rate Qc is forthe ozone obtained as a result of conversion from the raw gas having theflow rate Q. The flow rate Qn is for a raw material oxygen that has notbeen converted from the raw gas having the flow rate Q. That is, theflow rate Qx of the ozone (ozonized oxygen) gas is determined by theformula (A): {Qx=F(Q,C) . . . (A)} which is based on the flow rate Q andthe ozone concentration C of a raw material (oxygen) gas.

By the gas flow rate controller (MFC) 3, the flow rate of the raw gassupplied to the ozone generator is controlled to a constant value.

The APC 4 controls the pressure of the ozone gas flowing in an outputpipe path for the ozone gas of the ozone generator 1, and therebyautomatically controls the gas pressure of the ozone generator 1 to aconstant value.

The ozone generation unit 7-2 is configured as a package unit as oneunit in which a plurality of function means are assembled together, suchas the ozone generator 1 having means for generating the ozone gas, theozone power source 2 having means for supplying predetermined power tothe ozone gas, the MFC 3 having means for controlling the flow rate ofthe supplied raw gas to a constant value, the APC 4 having means forcontrolling a pressure value of the pressure in the ozone generator 1 toa constant value, the gas filter 51 having means for trapping theimpurity gas of the output ozone gas, and the ozone concentration meter5 having means for detecting an output ozone concentration value. Allthe ozone generation units 7-1 to 7-n have identical configurations(only the configuration of 7-2 is shown), and have the internalconfiguration described for the ozone generation unit 7-2 as arepresentative.

Each of the ozone generation units 7 (ozone generation units 7-1 to 7-n)has a water leakage sensor 6 provided on a bottom surface thereof, tomonitor presence or absence of water leakage of each ozone generationunit 7. More specifically, information obtained from the water leakagesensor 6 is supplied to an EMO circuit (emergency stop circuit) 81 in asystem collective management unit 8, so that the monitoring can be madeunder control of a system management control part 84.

The system collective management unit 8 provided in the ozone gas supplysystem 10 receives detection information from each of an exhaust gassensor 23 and an ozone leak sensor 24. The exhaust gas sensor 23monitors and keeps a negative pressure state of the interior of theapparatus by vacuuming the interior through an exhaust duct 11. When thesystem collective management unit 8 receives an abnormal exhaust or anabnormal leakage from the exhaust gas sensor 23 or the ozone leak sensor24, the system collective management unit 8 causes the system managementcontrol part 84 to supply ozone generation unit control signals 86-1 to86-n that are stop instructions to all the ozone generation units 7-1 to7-n, to thereby stop operations of the ozone generation units 7-1 to7-n.

Also, the system management control part 84 provided in the systemcollective management unit 8 receives process ozone gas event signals16-1 to 16-n from ozone treatment apparatuses 12-1 to 12-n through auser information I/F 83. The process ozone gas event signals 16-1 to16-n include a request ozone flow rate Qs12 and a request ozoneconcentration Cs12.

Based on instructions indicated by the process ozone gas event signals16-1 to 16-n, the system management control part 84 outputs the ozonegeneration unit control signals 86-1 to 86-n to the ozone generationunits 7-1 to 7-n, and also outputs a control signal S8 to an ozone gasoutput flow rate management unit 9.

As a result, the flow rate and the concentration of an ozone gasoutputted from each of the ozone generation units 7-1 to 7-n arecontrolled, and additionally the opening/closing of an ozone gas controlvalve 9 a and the like provided in the ozone gas output flow ratemanagement unit 9 is controlled. Thereby, an ozone gas having a gas flowrate and a gas concentration in accordance with the instructions of theprocess ozone gas event signals 16-1 to 16-n can be supplied to theozone treatment apparatuses 12-1 to 12-n. In the following, the systemcollective management unit 8 will be described in more detail.

The system collective management unit 8 includes the EMO circuit 81 forstopping the apparatus in emergency, an unit information I/F 82, theuser information I/F 83, the system management control part 84, and amain control panel 85.

As described above, the EMO circuit 81 is a circuit for monitoring asystem error signal obtained from the water leakage sensor 6 of eachozone generation unit 7. To be more specific, when the EMO circuit 81receives detection information indicating detection of abnormal waterleakage from the water leakage sensor 6, the EMO circuit 81 transmitsthis information to the system management control part 84. Then, thesystem management control part 84 supplies the ozone generation unitcontrol signal 86 (any one of the ozone generation unit control signals86-1 to 86-n) to the ozone generation unit 7 corresponding to the waterleakage sensor 6 that has detected the abnormal water leakage. Thus, theozone generation unit 7 is stopped.

The unit information I/F 82 receives unit information signals 17-1 to17-n from the ozone generation units 7-1 to 7-n.

As described above, the user information I/F 83 receives the processozone gas event signals 16-1 to 16-n (indicating the request ozone flowrate Qs12, the request ozone concentration Cs12, operation informationY, an apparatus No., and the like), which are command signals, from theozone treatment apparatuses 12-1 to 12-n.

The system management control part 84 outputs the control signal S8which is a command for controlling the opening/closing of the ozone gascontrol valves (9 a, 9 b, 9 c, 9 ab, 9 bc, 9 ca) provided in the ozonegas output flow rate management unit 9, and thereby collectivelycontrols the parts within the ozone gas output flow rate management unit9. The system management control part 84 also receives information fromthe main control panel 85.

As shown in FIG. 1, the ozone gas supply system 10 includes a coolingwater inlet port 13A and a cooling water outlet port 13B. Cooling wateris introduced from an external cooling system (not shown) through thecooling water inlet port 13A and cooling water inlet ports 13 a-1 to 13a-n into the ozone generation units 7-1 to 7-n. The water having servedfor the cooling is outputted from the ozone generation units 7-1 to 7-nthrough cooling water outlet ports 13 b-1 to 13 b-n and the coolingwater outlet port 13B to the outside.

The ozone gas supply system 10 has the raw gas supply port 14. The rawgas is introduced from the outside into the ozone generation units 7-1to 7-n through the raw gas supply port 14 and the raw gas supply ports14-1 to 14-n.

The ozone gas output ports 15-1 to 15-n of the ozone generation units7-1 to 7-n are connected to the ozone gas output flow rate managementunit 9 in the ozone gas supply system 10, and the ozone gas is outputtedfrom the ozone gas output flow rate management unit 9 through ozone gasoutput ports 25-1 to 25-n to the outside of the ozone gas supply system10.

The process ozone gas event signals 16-1 to 16-n outputted from the nozone treatment apparatuses 12-1 to 12-n are inputted to the systemmanagement control part 84 via the user information I/F 83. The processozone gas event signal 16 (16-1 to 16-n) indicates the request ozoneflow rate Qs12, the request ozone concentration Cs12, the operationinformation Y, and the like. The system management control part 84outputs the ozone generation unit control signals 86-1 to 86-n forcontrolling the ozone generation units 7-1 to 7-n based on the processozone gas event signals 16-1 to 16-n.

The ozone generation units 7-1 to 7-n include ozone generation unitcontrol panels 85-1 to 85-n. The unit information signals 17-1 to 17-nare transmitted from the ozone generation units 7-1 to 7-n to the systemmanagement control part 84 via the unit information I/F 82 of the systemcollective management unit 8. The unit information signal 17 (17-1 to17-n) is an information signal indicating the breakdown and anoperating/stopping state of the ozone generator 1 included in each ozonegeneration unit 7.

The operation information Y included in the process ozone gas eventsignal 16 corresponds to a user information signal indicating thebreakdown and an operating/stopping state of each ozone treatmentapparatus 12 (12-1 to 12-n), and, as described above, outputted to theuser information I/F 83 of the system collective management unit 8.

Each of the ozone generation units 7-1 to 7-n includes an ozone controlpart 19. The ozone control part 19 is a control part, as will bedetailed later, that receives a set flow rate Qs and a detected flowrate Q for the flow rate of the raw gas, a set pressure Ps and adetected pressure P for the pressure of the ozone generator 1, and theozone concentration C of the ozone outputted from each ozone generationunit 7, and that controls the ozone power source 2 to thereby controlthe ozone concentration, the gas flow rate, and the like, of the ozonegas generated in the ozone generator 1. The ozone control part 19communicates signals with the ozone concentration meter 5, the MFC 3,the APC 4, and the ozone power source 2.

(Control of Ozone Gas Output Flow Rate Management Unit)

As shown in FIG. 2, the ozone gas output flow rate management unit 9 hasozone gas input ports 29-1 to 29-n corresponding to output parts of theozone generation units 7-1 to 7-n, respectively, and ozone gas outputports 39-1 to 39-n corresponding to input parts of the ozone treatmentapparatuses 12-1 to 12-n, respectively. Ozone gas on/off valves 22-1 to22-n are interposed between the ozone gas output ports 39-1 to 39-n(ozone gas output ports 25-1 to 25-n) and the ozone treatmentapparatuses 12-1 to 12-n. The ozone treatment apparatuses 12-1 to 12-nopen the ozone gas on/off valves 22-1 to 22-n at a time of the ozone gassupply. This ozone gas supply system 10 is configured as a systemincluding n ozone gas output ports, that is, the ozone gas output ports39-1 to 39-n. However, if the number of ozone treatment apparatuses atthe user side is less than n, a pipe fitting of the ozone gas outputport 39 not serving to output may be capped to plug an output of gas.

The ozone gas output flow rate management unit 9 is provided thereinwith the ozone gas control valves 9 a, 9 b, 9 c, 9 bc, 9 ab, and 9 ca.The ozone gas control valves 9 a, 9 b, and 9 c are normally open (NO),and the ozone gas control valves 9 bc, 9 ab, and 9 ca are normally close(NC). For convenience of the description, FIG. 2 shows a specific casewhere n=3. As the ozone gas control valves 9 a, 9 b, 9 c, 9 bc, 9 ab,and 9 ca, electrically-operated valves or pneumatic valves which areopenable and closable by means of electricity or air pressure areconceivable.

The ozone gas control valves 9 a to 9 c are interposed between the ozonegas input ports 29-1 to 29-n for the input of the ozone gas from theozone generation units 7-1 to 7-n, and the ozone gas output ports 39-1to 39-n. The ozone gas control valve 9 ab is provided between theoutputs of the ozone gas control valves 9 a and 9 b. The ozone gascontrol valve 9 bc is provided between the outputs of the ozone gascontrol valves 9 b and 9 c. The ozone gas control valve 9 ca is providedbetween the outputs of the ozone gas control valves 9 c and 9 a.

An open state and a closed state of each of the ozone gas control valves9 a, 9 b, 9 c, 9 bc, 9 ab, and 9 ca are controlled based on the controlsignal S8 supplied from the system management control part 84 of thesystem collective management unit 8.

In FIG. 2, among the ozone treatment apparatuses 12-1 to 12-n, only oneozone treatment apparatus 12-2 is operated, and the ozone gas on/offvalve 22-2 thereof is in the open state (blacked out). FIG. 2 shows astate of the ozone gas output flow rate management unit 9 in a casewhere the flow rate of the ozone gas supplied to the ozone treatmentapparatus 12-2 is 30 SLM (L/min). In other words, the ozone treatmentapparatus 12-2 instructs that the ozone flow rate be 30 SLM based on therequest ozone flow rate Qs12 included in the process ozone gas eventsignal 16-2.

The system management control part 84 provided in the system collectivemanagement unit 8 controls, by the ozone generation unit control signals86-1 to 86-n, the ozone generation units 7-1 to 7-n such that the ozonegas can be supplied by 10 SLM from each of the ozone generation units7-1 to 7-n.

Further, the system management control part 84 controls, by the controlsignal S8, the open and closed states of each of the ozone gas controlvalves 9 a, 9 b, 9 c, 9 bc, 9 ab, and 9 ca in the ozone gas output flowrate management unit 9. More specifically, the system management controlpart 84 outputs, to the ozone gas output flow rate management unit 9,the control signal S8 for bringing the ozone gas control valves 9 a, 9b, 9 c, 9 bc, and 9 ab into the open state (blacked out) while bringingthe ozone gas control valve 9 ca into the closed state (shown in white).

As mentioned above, among the ozone gas on/off valves 22-1 to 22-n, onlythe ozone gas on/off valve 22-2 is in the open state, and the ozone gason/off valves 22-1 and 22-n are in the closed state. In the descriptiongiven herein, the ozone treatment apparatus 12 not to be used is broughtinto the closed state by means of the ozone gas on/off valves 22-1 to22-n. Alternatively, it may be acceptable that the ozone treatmentapparatus not to be used is forcibly capped by a pipe fitting at theportion 25-1 to 25-n in order to block the ozone gas supply.

In this manner, the system management control part 84 causes each of theozone generation units 7-1 to 7-n to supply the ozone gas with a flowrate of 10 SLM by the ozone generation unit control signals 86-1 to86-n, and also controls the ozone gas output flow rate management unit 9based on the control signal S8. Thereby, the system management controlpart 84 can supply the ozone gas to the ozone treatment apparatus 12-2with a gas flow rate of 30 SLM (10 SLM×3).

(Main Control Panel)

As shown in FIG. 3, the main control panel 85 of the ozone gas supplysystem 10, on a display surface thereof, the open and closed states ofthe ozone gas control valves 9 a, 9 b, 9 c, 9 bc, 9 ab, and 9 ca inassociation with the ozone generation units 7-1 to 7-n and the ozonetreatment apparatuses 12-1 to 12-n. The request ozone flow rate Qs12(SLM) and the request ozone concentration Cs12 (g/m³) of the ozonetreatment apparatuses 12-1 to 12-n are also displayed.

In an example shown in FIG. 3, only the ozone treatment apparatus 12-2requests the request ozone flow rate Qs12=30 SLM and the request ozoneconcentration Cs12=280 (g/m³).

Thereby, each of the ozone generation units 7-1 to 7-n is caused tooutput the ozone gas with an ozone flow rate of 10 (SLM) and an ozoneconcentration of 280 (g/m³), and the ozone gas control valves 9 a, 9 b,9 c, 9 bc, and 9 ab are brought into the open state while the ozone gascontrol valve 9 ca is brought into the closed state. Thus, the ozone gascan be supplied to the ozone treatment apparatus 12-2 with an ozone flowrate of 30 (SLM) and an ozone concentration of 280 (g/m³).

(Ozone Control Part)

As shown in FIG. 4, the ozone control part 19 provided in each ozonegeneration unit 7 controls the ozone power source 2 to thereby controlan ozone generation (the gas flow rate and the ozone gas concentration)of the ozone generator 1.

The ozone power source 2 includes a converter 2 a, an inverter 2 b, ahigh voltage circuit part 2 c, and a current sensor 2 d. The converter 2a rectifies commercial AC voltages AC1φ to AC3φ. The inverter 2 bconverts a DC voltage into an optimum frequency for the ozone generator1, and controls an output voltage to supply predetermined power to theozone generator 1. The high voltage circuit part 2 c raises the voltageoutputted from the inverter 2 b into a high voltage capable ofgenerating the discharge that causes the ozone generation in the ozonegenerator 1. The converter 2 a, the inverter 2 b, and the high voltagecircuit part 2 c are connected in series in the mentioned order. Thecurrent sensor 2 d is interposed between the converter 2 a and theinverter 2 b.

In order to control the ozone gas generation (the gas flow rate Q andthe ozone concentration C) in the ozone generator 1, the ozone controlpart 19 applies the high frequency high voltages HV and LV, which areoutputted by the high voltage circuit part 2 c, to the ozone generator1, and causes a discharge phenomenon to thereby generate an ozone gascontaining a predetermined amount of ozone from an oxygen gas which isthe raw gas.

The ozone control part 19 includes a raw gas flow rate setter 1S1, aselector 1S2, an ozone concentration setter 1S3, analog switches 1S4-Ato 1S4-F for controlling ON/OFF of the respective control signals, andinverter devices 1S5-1, 1S5-2 for inverting the respective controlsignals.

The ozone control part 19 further includes a data memory 1S6 and acurrent signal converter 1S7. The data memory 1S6 stores a set power Wsnecessary for generating an optimum amount of ozone in response to theraw gas set flow rate Qs, the set concentration Cs, and a signalincluding a set pressure Ps of the ozone generator 1. The current signalconverter 1S7 converts the set power Ws into a current signal forapplying a necessary current to the ozone power source.

Additionally, the ozone control part 19 includes a timer 1S8 and a PIDcontrol circuit 1S9. The timer 1S8 drives the inverter 2 b based on aninitial current command, and switches into a PID control in response tothe flow rate Q of the actually flowing raw gas and the generated ozoneconcentration C obtained by the MFC 3 and the ozone concentration meter5. The PID control circuit 1S9 performs the PID control based on aresult of comparison between the ozone concentration C and the gas setconcentration Cs.

Moreover, the ozone control part 19 includes an event adjuster 1S10 forreceiving the ozone generation unit control signal 86 from the systemmanagement control part 84 and adjusting the signal including the setflow rate Qs and the set ozone concentration Cs based on the requestozone flow rate Qs8, the request ozone concentration Cs8, and theoperation information Y8 indicated by the ozone generation unit controlsignal 86.

Furthermore, the ozone control part 19 includes a pressure setter 1S11,an initial pulse width setter 1S12, and a current converter 1S13. Theinitial pulse width setter 1S12 sets, based on the output current of thecurrent signal converter 1S7, an initial pulse width in which theinverter 2 b is turned ON, for controlling the applied power. Thecurrent converter 1S13 receives the ozone concentration C detected bythe ozone concentration meter 5 and the set ozone concentration Cs, and,based on a result of comparison between the ozone concentration C andthe raw gas set concentration Cs, outputs a current signal forcontrolling the power applied to the inverter 2 b.

(Data Memory 1S6)

As shown in FIG. 5, the data memory 1S6, which stores initial conditionsfor controlling the ozone concentration and the ozone flow rate in theozone generation unit 7, includes a plurality of memory banks BK1 to BK4(four memory banks are shown in FIG. 5 for convenience of thedescription), with the set pressure Ps of the ozone generator 1 servingas a parameter. If the set pressure Ps of the ozone generator 1 isdetermined, accordingly the memory bank BKx (any one of the memory banks1 to 4) corresponding to the set pressure Ps is selected.

As shown in FIG. 5, the one memory bank BK selected is divided into aplurality of areas each corresponding to ΔQ along a horizontal axis(X-axis) that represents an address of the set flow rate Qs for theozone-gas flow rate, while the one memory bank BK selected is dividedinto a plurality of areas each corresponding to AC along a vertical axis(Y-axis) that represents an address of the set concentration Cs for theozone concentration.

The data memory 1S6 receives the signal including the set flow rate Qsand the set concentration Cs functioning as the address in thehorizontal axis (X-axis) and the vertical axis (Y-axis). In the datamemory 1S6, a set power amount W (A11 to A17, . . . , A61 to A67)required for generating a predetermined amount of ozone is written intoa memory address which is determined by the address in the X-axis andthe Y-axis. The data memory 1S6 outputs the set power amount Ws to thecurrent signal converter 1S7 provided in the ozone control part 19. As aresult, the current signal converter 1S7 converts the set power amountWs into the current signal. The current signal is supplied through theanalog switch 1S4-E to the initial pulse width setter 1S12. The initialpulse width setter 1S12 outputs a pulse signal Tw to the inverter 2 b.The pulse signal Tw has a predetermined frequency and a predeterminedpulse width, and is for achieving the set power amount Ws.

As shown in FIG. 6, the output concentration control waveform forperforming the output concentration control on the ozone generation unit7 corresponds to an operation command signal (included in the operationinformation Y8) supplied to the ozone generation unit 7, and, in aninitial state defined by a set time period To, sets the power applied tothe inverter 2 b based on the set power amount Ws supplied from the datamemory 1S6.

After the elapse of the set time period To, the timer 1S8 performs atime control so that the control is switched to the PID control by thePID control circuit 1S9. The PID control circuit 1S9 slightly varies apulse width ΔTw of the pulse signal Tw based on the current signal (thesignal determined based on the result of comparison between the ozonegas concentration C (detected by the ozone concentration meter 5) andthe gas set concentration Cs) supplied from the current converter 1S13.Thereby, the PID control circuit 1S9 performs the PID control of thepower applied to the inverter 2 b. As a result, the ozone concentration(C) of the ozone generated in the ozone generator 1 exhibits the controlresponsiveness waveform shown in part (a) of FIG. 6.

Hereinafter, a concentration control shown in FIG. 6 will be describedin detail. Firstly, a description will be given to an operation of onlythe ozone generation unit 7, which is not based on the ozone generationunit control signal 86.

Triggered by an input of an operation command (not shown), the eventadjuster 1S10 activates the timer 1S8. At this time, the event adjuster1S10 controls the selector 1S2 so as to select the raw gas set flow rateQs of the raw gas flow rate setter 1S1, and brings the analog switches1S4-A and 1S4-D into the ON state while bringing the analog switches1S4-B and 1S4-C into the OFF state. On the other hand, the timer 1S8,immediately after being activated, brings the analog switch 1S4-E intothe ON state while bringing the analog switch 1S4-F into the OFF state.

Thus, the data memory 1S6 obtains the set pressure Ps from the pressuresetter 1S11, the raw gas set flow rate Qs from the raw gas flow ratesetter 1S1, and the raw gas set concentration Cs from the ozoneconcentration setter 1S3. Consequently, as described above, the datamemory 1S6 outputs the set power amount Ws to the current signalconverter 1S7. As a result, the initial pulse width setter 1S12generates the pulse signal Tw having the initial pulse width. The ON/OFFof the inverter 2 b is controlled in accordance with “H” or “L” of thepulse signal Tw.

In this manner, within the set time period To for which the timer 1S8 isin an operation state, an initial control is performed based on the setpower amount Ws supplied from the data memory 1S6.

Then, if the set time period To has elapsed after the timer 1S8 isactivated, the initial state ends, and the analog switch 1S4-E isswitched to the OFF state while the analog switch 1S4-F is switched tothe ON state.

Thus, the PID control circuit 1S9 performs the PID control on the ozonepower source 2. The PID control is mainly for, based on the currentsignal supplied from the current converter 1S13, causing a slightdisplacement (ΔTw) of the pulse width of the pulse signal Tw so as toreflect the result of comparison between the ozone concentration Cobtained by the ozone concentration meter 5 and the gas setconcentration Cs. Here, also based on a current I detected by thecurrent sensor 2 d, the PID control circuit 1S9 causes the slightdisplacement ΔTw. In this manner, the control is switched to the PIDcontrol (W) if the set time period To has elapsed after the operationcommand.

Next, a description will be given to an operation of only the ozonegeneration unit 7, which is based on the ozone generation unit controlsignal 86.

Triggered by an input of the ozone generation unit control signal 86indicating the request ozone flow rate Qs8, the request ozoneconcentration Cs8, and the operation information Y8, the event adjuster1S10 activates the timer 1S8. At this time, the analog switches 1S4-Aand 1S4-D are brought into the OFF state, and the analog switches 1S4-Band 1S4-C are brought into the ON state. On the other hand, the timer1S8, immediately after being activated, brings the analog switch 1S4-Einto the ON state while bringing the analog switch 1S4-F into the OFFstate.

The request ozone flow rate Qs8 and the request ozone concentration Cs8are determined by the system management control part 84 based on therequest ozone flow rate Qs12 and the request ozone concentration Cs12that are indicated by the process ozone gas event signals 16-1 to 16-nsupplied from the ozone treatment apparatuses 12-1 to 12-n.

Thus, the data memory 1S6 obtains the set pressure Ps from the pressuresetter 1S11, and the request ozone flow rate Qs8 and the request ozoneconcentration Cs8 indicated by the ozone generation unit control signal86 which serve as the set flow rate Qs and the set concentration Cs.Consequently, as described above, the data memory 1S6 outputs the setpower amount Ws to the current signal converter 1S7. As a result, theinitial pulse width setter 1S12 generates the pulse signal Tw having theinitial pulse width.

In this manner, also by the input of the ozone generation unit controlsignal 86, the initial control is performed based on the set poweramount Ws supplied from the data memory 1S6 within the set time periodTo for which the timer 1S8 is in the operation state.

Then, if the set time period To has elapsed after the timer 1S8 isactivated, the initial state ends, and the analog switch 1S4-E isswitched to the OFF state while the analog switch 1S4-F is switched tothe ON state.

Thus, the PID control circuit 1S9 performs the PID control on the ozonepower source 2. The PID control is mainly for, based on the currentsignal supplied from the current converter 1S13, causing a slightdisplacement (ΔTw) of the pulse width of the pulse signal Tw.

As thus far described, the ozone control part 19 performs the initialcontrol and the PID control on the ozone power source 2. FIG. 7 is agraph showing received power of the ozone power source 2 of 2.5 KWprovided in one ozone generation unit 7, and ozone concentrationcharacteristics of ozone occurring in the ozone generator 1.

In FIG. 7, ozone concentration characteristics L11 represent the ozoneconcentration characteristics obtained when the flow rate Q of the ozonegas supply is 1.25 L/min (=1.25 SLM). In this case, by making thereceived power variable in a range of 100 W to 1.0 kW, the occurringozone concentration can be variably set in a range of about 0 g/m³ to360 g/m³.

In the same manner, ozone concentration characteristics L12 representthe ozone concentration characteristics obtained when the flow rate Q ofthe ozone gas supply is 2.5 SLM. In this case, by making the receivedpower variable in a range of 100 W to 2.0 kW, the ozone concentrationcan be variably set in a range of about 0 g/m³ to 360 g/m³.

Ozone concentration characteristics L13 represent the ozoneconcentration characteristics obtained with the flow rate Q of the ozonegas supply is 5.0 SLM. Ozone concentration characteristics L14 representthe ozone concentration characteristics obtained when the flow rate Q ofthe ozone gas supply is 7.5 SLM. Ozone concentration characteristics L15represent the ozone concentration characteristics obtained with the flowrate Q of the ozone gas supply is 10 SLM. Ozone concentrationcharacteristics L16 represent the ozone concentration characteristicsobtained when the flow rate Q of the ozone gas supply is 20 SLM. Ozoneconcentration characteristics L17 represent the ozone concentrationcharacteristics obtained when the flow rate Q of the ozone gas supply is30 SLM.

In a case where the ozone gas is supplied from one ozone generation unit7 with a flow rate Q of 5 SLM, the maximum ozone concentration generatedby the received power 2.5 kW is 350 g/m³ (see the ozone concentrationcharacteristics L13). In a case where the ozone gas is supplied with aflow rate Q of 7.5 SLM, the maximum ozone concentration generated by thereceived power 2.5 kW is 300 g/m³ (see the ozone concentrationcharacteristics L14).

In a case where the ozone gas is supplied with a flow rate Q of 10 SLM,the maximum ozone concentration generated by the received power 2.5 kWis only 280 g/m³ (see the ozone concentration characteristics L15). In acase where the ozone gas is supplied with a flow rate Q of 20 SLM, themaximum ozone concentration generated by the received power 2.5 kW isonly 180 g/m³ (see the ozone concentration characteristics L16). In acase where the ozone gas is supplied with a flow rate Q of 30 SLM, themaximum ozone concentration generated by the received power 2.5 kW isonly 140 g/m³ (see the ozone concentration characteristics L17).

In order to maintain an ozone concentration of 280 g/m³ in the ozonegeneration unit 7 including the ozone power source 2 with a receivedpower of 2.5 kW, the highest possible flow rate of the supply by oneozone generator 1 is 10 SLM. In other words, in order to satisfy anozone concentration of 280 g/m³ by using one ozone generator 1, theozone gas cannot be supplied with a flow rate equal to or higher than 10SLM.

On the other hand, the ozone gas supply system 10 of this embodimentadopts an output ozone gas output control method in which the ozone gasoutput flow rate management unit 9 can selectively output one or more ofn ozone gas outputs supplied from the n ozone generation units 7-1 to7-n to any ozone treatment apparatus 12 among the ozone treatmentapparatuses 12-1 to 12-n.

Therefore, in the ozone gas supply system 10 of the embodiment 1, bycontrolling the opening/closing of the ozone gas control valves 9 ab, 9bc, and 9 ca provided between the units within the ozone gas output flowrate management unit 9 in the manner as shown in FIGS. 2 and 3, all theozone gas generated by the n ozone generation units 7-1 to 7-n can besupplied to only one ozone treatment apparatus 12-2. Accordingly, bycausing each of the ozone generation units 7-1 to 7-n to output theozone gas with a flow rate of 10 SLM and an ozone gas concentration of280 g/m³, the ozone gas can be supplied to the ozone treatment apparatus12-2 with a gas flow rate of 30 SLM, and at that time, the ozoneconcentration can be made as high as 280 g/m³. This provides an effectthat the treatment capacity of the ozone treatment apparatus such as aprocessing speed and a capability can be considerably improved whileusing the existing ozone generator.

Additionally, if the flow rate of the raw gas is 10 SLM in the ozonegeneration unit 7, the maximum outputtable ozone concentration is 280g/m³. However, the ozone concentration can be increased by using thecontrol of opening/closing of the ozone gas control valves 9 ab, 9 bc,and 9 ca provided between the units in the ozone gas output flow ratemanagement unit 9.

For example, if the opening/closing of the ozone gas control valves 9 a,9 b, 9 c, 9 bc, 9 ab, and 9 ca is controlled as shown in FIGS. 2 and 3such that each of the three ozone generation units 7 can supply the gaswith a flow rate of 3.3 SLM, the output concentration can be increasedto the maximum value of the ozone concentration corresponding to 3.3SLM. Thus, as indicated by an imaginary point P3, the ozone gas can besupplied with a total flow rate of 10 SLM with an ozone concentration ofabout 330 g/m³. This provides an effect that an ozone treatment capacityof the ozone treatment apparatus 12-2 that receives the ozone gas supplycan be increased.

In the ozone gas supply system 10 of this embodiment that adopts theoutput ozone gas output control method in which the n ozone generationunits 7 are mounted and the ozone gas output flow rate management unit 9is formed, breakdown of any of the ozone generation units 7-1 to 7-ndoes not make the corresponding ozone treatment apparatus 12 unusable.The ozone gas outputted from the ozone generation unit 7 not broken downcan be supplied by opening/closing the ozone gas control valves 9 ab, 9bc, and 9 ca. This can provide an ozone gas supply system with a higherreliability of ozone gas supply.

For example, in a case where the ozone generation unit 7-2 correspondingto the ozone treatment apparatus 12-2 is broken down, the ozone gassupplied from the ozone generation unit 7-1 can be supplied to the ozonetreatment apparatus 12-2 by bringing the ozone gas control valves 9 a, 9ab and the ozone gas on/off valve 22-2 into the open state.

Furthermore, even though any of the n ozone treatment apparatuses 12-1to 12-n is broken down or stops its operation, the operation informationY of the process ozone gas event signal 16 is introduced and thereby theoperation of the ozone generation unit 7 that is supplying the ozone gasto the broken-down ozone treatment apparatus 12 can be promptly stoppedby the ozone generation unit control signal 86.

(Effects, etc.)

In the embodiment 1 described above, one ozone gas supply system 10includes the plurality of ozone generation units 7-1 to 7-n, and eachozone generation unit 7 includes the ozone generator 1, the ozone powersource 2 for controlling power to be supplied for ozone generation, theMFC 3 for controlling the flow rate Q of the ozone gas, the APC 4 forautomatically controlling the pressure P in the ozone generator 1, andthe ozone concentration meter 5 for detecting the output ozoneconcentration value C.

In the ozone gas supply system 10, the ozone gas output flow ratemanagement unit 9 is provided in which the on/off valve (ozone gascontrol valves 9 a to 9 c) is arranged corresponding to the output ozonegas pipe of each ozone generator 1, and additionally the on/off valve (9bc, 9 ab, 9 ca) is arranged between the output ozone gas pipes of therespective ozone generators 1.

The ozone gas supply system 10 of the embodiment 1 includes the systemcollective management unit 8 (ozone gas output flow rate managementunit) that can control the ozone gas output flow rate so that one or acombination of two or more of the plurality of ozone gas outputs fromthe ozone generation units 7-1 to 7-n can be selectively outputted toany of the ozone treatment apparatuses 12-1 by the opening/closingoperation of the ozone gas control valves 9 a, 9 b, 9 c, 9 bc, 9 ab, and9 ca provided in the ozone gas output flow rate management unit 9.

Accordingly, by bringing the ozone gas control valves 9 a, 9 b, and 9 cinto the open state, bringing the ozone gas control valves 9 ab, 9 bc,and 9 ca into the closed state, and bringing the ozone gas on/off valves22-1 to 22-n into the open state so that the ozone gas can be suppliedfrom the ozone generation units 7-1 to 7-n to the ozone treatmentapparatuses 12-1 to 12-n that are in one-to-one correspondence with eachother, the flow rate and the ozone gas concentration of the ozone gassupply can be independently controlled in each of the ozone treatmentapparatuses 12-1 to 12-n.

Additionally, as shown in FIGS. 2 and 3, by supplying a combination oftwo or more ozone gas outputs to one ozone treatment apparatus (ozonetreatment apparatus 12-2), the ozone gas can be supplied with variousgas flow rates and concentrations.

Moreover, even if trouble occurs in a part of the ozone generation units7-1 to 7-n, the other ozone generation units 7 that are normallyoperating can supply the ozone gas to any of the ozone treatmentapparatuses 12-1 to 12-n. Therefore, an ozone gas supply with a highreliability can be achieved.

In this manner, the ozone gas supply system 10 controls the ozone gasoutput flow rate management unit 9 based on the control signal S8supplied from the system management control part 84, to perform acombination/selection process for combining and selecting ozone gasoutputs from the ozone generation units 7-1 to 7-n, so that the ozonegas can be outputted to the ozone treatment apparatus 12 with a desiredgas flow rate and a desired ozone gas concentration.

In the ozone gas supply system 10 of the embodiment 1, the ozone gascontrol valves 9 a, 9 b, 9 c, 9 bc, 9 ab, and 9 ca provided in the ozonegas output flow rate management unit 9 can be electrically-operatedvalves or pneumatic valves that are openable and closable by means ofelectricity or air pressure, so that the gas flow rate and the ozone gasconcentration of the ozone gas outputted from the ozone generator 1 ofeach ozone generation unit 7 to the outside can be centrally managedunder control of the control signal S8.

The system collective management unit 8 includes the water leakagesensor 6, the EMO circuit 81, the unit information I/F 82, the systemmanagement control part 84, and the like. Thereby, in a case where anemergency stop or water leakage is detected in any of the ozonegeneration units 7-1 to 7-n, the corresponding said ozone generationunit can be stopped.

Furthermore, the exhaust gas sensor 23, the ozone leak sensor 24, thesystem management control part 84, and the like, are provided. Thereby,in a case where an abnormal exhaust or ozone abnormal leakage isdetected in the system as a whole, all the ozone generation units 7-1 to7-n can be stopped.

In this manner, the ozone gas supply system 10 of the embodiment 1 has asafety shutdown function in case of trouble of each ozone generationunit 7, trouble of the entire ozone gas supply system 10, and the like.Thus, a system with a high security can be achieved.

Embodiment 2

An embodiment 2 is characterized by focusing on the ozone generationunit 7 as one unit corresponding to each of the ozone generation units7-1 to 7-n in the ozone gas supply system 10, and achieving downsizingof the ozone generation unit 7.

FIG. 8 is a circuit diagram showing details of an internal configurationof the ozone power source 2. FIG. 9 is a perspective view schematicallyshowing a combined structure of an ozone generation unit 7X according tothe embodiment 2.

Hereinafter, downsizing of the ozone generation unit 7X will bedescribed with reference to FIGS. 8 and 9. The ozone generation unit 7Xmeans an ozone generation unit as one unit that is configured as each ofthe ozone generation units 7-1 to 7-n according to the embodiment 1.

In the ozone generation unit 7X shown in FIG. 9, each of the ozone powersource 2 and the ozone generator 1 is downsized. Not only thecompactified ozone power source 2 and the compactified ozone generator1, but also the MFC 3 for controlling the flow rate of the raw gas, theozone gas filter 51, the ozone concentration meter 5, and the APC 4, areassembled together and packaged, thereby achieving the ozone generationunit 7X serving as one unit in a structural sense, too.

Additionally, a raw gas pipe (raw gas supply port 14) and an output gaspipe system (ozone gas output port 15) are integrated into a gas pipeintegrated block 30 as a gas pipe integrated block structure. Thereby,the ozone generator 1, the ozone power source 2, and the gas pipe systemcan be packaged, and thus the ozone generation unit 7X can be furtherdownsized.

Therefore, even if, as in the ozone gas supply system 10 of theembodiment 1, a plurality of ozone generation units 7X are mounted asthe ozone generation units 7-1 to 7-n, an ozone gas supply system havingimproved functionality and reliability can be achieved withoutincreasing the size of the apparatus as a whole.

(Compactification of Ozone Power Source 2)

FIG. 8 shows a circuit configuration compactified by integrating maincomponents of the ozone generator 1 and the ozone power source 2 witheach other.

In order to obtains a desired amount of ozone generation, the ozonegenerator 1 requires a necessary area as a discharge area for generationof ozone. Therefore, to reduce an occupied area of the generator, a thinelectrode cell is formed and moreover a cross-sectional area of oneelectrode cell is reduced. Thereby, the ozone generator 1 ofmulti-layered electrode cell type is formed. This can achieve the ozonegenerator 1 with a very small occupied area.

The ozone power source 2 includes the converter 2 a for rectifying thecommercial AC voltage, the inverter 2 b for converting the DC voltageinto a high frequency optimum for the ozone generator and controllingthe output voltage to supply predetermined power to the ozone generator,and the high voltage circuit part 2 c for raising the voltage outputtedfrom the inverter 2 b into a high voltage capable of generating thedischarge that causes the ozone generation in the ozone generator 1. Theozone control part 19 controls injected power of the ozone power source.

The converter 2 a is made up of a rectifier circuit 2 a 1, a capacitorbank 2 a 2, a smoothing reactor 2 a 3, a chopper circuit part 2 a 4, anda chopper control circuit part 2 a 5 that are connected in series. Theinverter 2 b is made up of an inverter circuit 2 b 1 and an invertercontrol circuit 2 b 2. Each component of the converter 2 a and theinverter 2 b of the ozone power source 2 is sorted and formed into amodule, thus downsizing the circuit configuration.

To be specific, the rectifier circuit 2 a 1, the capacitor bank 2 a 2,and the smoothing reactor 2 a 3 are integrated into a DC/smoothingcircuit part 2 ax as a module. Thus, the circuit configuration isdownsized, and the quality of the component is increased.

The chopper circuit part 2 a 4 forming the converter 2 a and theinverter circuit 2 b 1 forming the inverter 2 b are made of powersemiconductors such as an FET device or an IGBT device, and need to becooled by a cooling fin. Therefore, by forming the chopper circuit part2 a 4 and the inverter circuit 2 b 1 into a single semiconductor module,an effectively downsized power device part 2 p is achieved. By formingthe chopper control circuit 2 a 5 of the converter 2 a and the invertercontrol circuit 2 b 2 of the inverter 2 b on a single substrate or as anintegrated circuit IC, an extremely downsized power supply controlsubstrate 2 q is achieved.

The high voltage circuit part 2 c is made up of a series reactor L0 forlimiting an inverter output current, a high voltage transformer Tr forraising the voltage, and a parallel reactor Lb for improving powerfactor. Each of the components is large and heavy in weight. However, aspecial transformer is formed by which the series reactor L0 and theparallel reactor Lb can be integrated and functions thereof can beincorporated into the high voltage transformer Tr. That is, atransformer is designed such that the series reactor L0 can beintegrated by using a primary leakage inductance of the high voltagetransformer. The parallel reactor Lb is designed such that a largeexcitation inductance of the transformer can be obtained. Thus, thefunction of the parallel reactor Lb can be incorporated into thetransformer.

Furthermore, the high voltage transformer Tr is adapted to a highfrequency of several tens of kHz. Thereby, the transformer can be formedusing a ferrite core having a light weight and good high frequencycharacteristics. To reduce an installation area of the transformer Trand to ensure a predetermined capacity of the transformer, a pluralityof small transformers are connected in parallel. The plurality of (inthe drawing, three) transformers are vertically installed, thusachieving the very small high voltage circuit part 2 c. However, theseries reactor L0 for limiting the output current of the inverter maynot be integrated into the transformer, but may be independently formedas a small reactor L0.

(Combined Structure of Ozone Generation Unit)

FIG. 9 shows the ozone generation unit 7X as one unit in which the ozonegenerator 1, the ozone power source 2, the MFC 3, the gas filter 51, theozone concentration meter 5, the APC 4, and the gas pipe integratedblock 30 are assembled together.

In FIG. 9, an control panel 85-i (i=any of 1 to n) is provided on afront surface (at the left side in FIG. 9), and the integrated ozonecontrol part 19 (not shown) is provided at the rear side thereof. Theozone control part 19 is connected via electrical signals to the ozonegenerator 1, the ozone power source 2 (blocks BL1 and BL2), the MFC 3,the ozone concentration meter 5, and the APC 4 that are assembledtogether. Hereinafter, a description will be given while a side wherethe control panel 85-i exists is defined as the front surface of theozone generation unit 7X.

As shown in FIG. 8, in the ozone generator 1 and the ozone power source2, each of the components is formed into a module, for example, so thatthe number of components is reduced, thus compactifying each componentand reducing the installation area thereof. As shown in FIG. 9, in oneozone generation unit 7X, the DC/smoothing circuit part 1Ax, the ozonegenerator 1 is provided at the center, and the power device part 2 p,and the power supply control substrate of the ozone power source 2 areformed into the single block BL1 and arranged at the front surface whilea plurality of small transformers laminated in the vertical directionare formed into the high voltage circuit part 2 c as the block BL2. Bysuch a distributed arrangement, the integration is made.

The gas supply pipe system including the MFC 3 for supplying the rawgas, the ozone gas output pipe system for outputting the ozone gas tothe outside via the gas filter 51, the ozone concentration meter 5, andthe APC 4, and a cooling pipe system (the cooling water inlet port 13A,the cooling water outlet port 13B) for cooling the electrodes of theozone generator 1 are necessary for the ozone generator 1. These pipesystems have to be arranged three-dimensionally. Therefore, if thecomponents are connected by existing gas pipes, cooling pipes, and thelike, the number of connection joints for connecting the pipes and thecomponents is increased. It is necessary to ensure a connection spacefor connecting the joints. Thus, in order to connecting these pipesystems, a very large space is required.

Conventionally, a pipe unit separate from the ozone generation unit(ozone generator) is provided, for example, at the rear side, and thegenerator unit and the pipes are connected at the rear side. Therefore,it has been difficult to integrate the ozone generation unit with thegas supply pipe system, the ozone gas output pipe system, and thecooling pipe system 13A, 13B.

In the embodiment 2, these pipe systems are assembled together into thesingle gas pipe integrated block 30, and pipe paths for the gas supplypipe, the ozone gas output pipe, and the cooling pipe are incorporatedin the gas pipe integrated block 30. This gas pipe integrated block 30has a three-dimensional structure, and at respective surfaces thereof,the ozone generator 1, the MFC 3, the gas filter 51, the ozoneconcentration meter 5, and the APC 4 (hereinafter, these may becollectively referred to as “ozone generator 1 and the like”) areadjacently arranged. A connecting portion between the ozone generator 1and the like and the gas pipe integrated block 30 is, for example,screwed via an O-ring, thereby keeping air-tightness to ensure highlyaccurate pipe paths. As a result, the ozone generator 1 and the like canbe arranged integrally with the gas pipe integrated block 30.Additionally, the components of the ozone generator 1 and the like canbe mounted and dismounted easily, thus improving maintainability.

In this manner, in the ozone generation unit 7X of the embodiment 2, theozone generator 1 and the like are mounted in close contact with the gaspipe integrated block 30. In the following, a description will be givento the pipe paths in the ozone generation unit 7X which utilizes the gaspipe integrated block 30 shown in FIG. 9. In the gas pipe integratedblock 30, pipe paths R30 a to R30 f are provided. The cooling waterinlet port 13A, the cooling water outlet port 13B, the raw gas supplyport 14, and the ozone gas output port 15 are mounted to the sidesurfaces of the gas pipe integrated block 30. The ozone generator 1 ismounted to the gas pipe integrated block 30 using ozone generatormounting bolts Bt1 to Bt4.

The MFC 3 is interposed between MFC mounting blocks 33, 33 and therebymounted to the gas pipe integrated block 30. The APC 4 is interposedbetween APC mounting blocks 34, 34 and thereby mounted to the gas pipeintegrated block 30. The ozone concentration meter 5 is interposedbetween ozone concentration meter mounting blocks 35, 35 and therebymounted. In these mounting blocks 33 to 35, in-block passages B3 to B5for ensuring the pipe paths are formed. The gas filter 51 is mounted tothe gas pipe integrated block 30 by using a gas filter mounting block31.

A raw gas input pipe path for a raw gas Gm to be supplied from the rawgas supply port 14 through the MFC 3 to an ozone generator input partET1 of the ozone generator 1 is a path formed by the raw gas supply port14, the pipe path R30 a, the in-block passage B3, the MFC 3, thein-block passage B3, the pipe path R30 b, and the ozone generator inputpart ET1 arranged in the mentioned order. At this time, a region of theozone generator 1 around the ozone generator input part ET1 is mountedto the gas pipe integrated block 30 by the ozone generator mounting boltBt1. In this manner, the input pipe path for the raw gas Gm is formedusing the gas pipe integrated block 30.

An ozone gas output pipe for an ozone gas outputted from the ozonegenerator 1 and received by the ozone generator output part EX1 to beoutputted from the ozone gas output port 15 through the gas filter 51,the ozone concentration meter 5, and the APC 4 is a path formed by theozone generator output part EX1, the pipe path R30 c, the inside of thegas filter mounting block 31, the gas filter 51, the inside of the gasfilter mounting block 31, the pipe path R30 d, the in-block passage B5,the ozone concentration meter 5, the in-block passage B5, the pipe pathR30 e, the in-block passage B4, the APC 4, the in-block passage B4, thepipe path R30 f, and the ozone gas output port 15 arranged in thementioned order. At this time, a region of the ozone generator 1 aroundthe ozone generator output part EX1 is mounted to the gas pipeintegrated block 30 by the ozone generator mounting bolt Bt2. In thismanner, the output pipe path for the ozone gas is formed using the gaspipe integrated block 30.

FIG. 25 is an explanatory diagram schematically showing a conventionalconfiguration corresponding to the ozone generation unit 7X. As shown inFIG. 25, conventionally, the configuration corresponding to the ozonegeneration unit 7X generally has a gas control unit 400, an invertercontrol unit 500, and an ozone generation unit 600 that are divided fromone another.

The gas control unit 400 is provided therein with an MFC 73, an APC 74,an ozone concentration meter 75, and a gas filter 91. The invertercontrol unit 500 is provided therein with a converter 2 a, an inverter 2b, an ozone control part 79, an control panel 85-i, a series reactor L0,and the like. The ozone generation unit 600 is includes an ozonegenerator 71, and a high voltage transformer Tr and a parallel reactorLb.

The inside of the converter 2 a includes a rectifier circuit 2 a 1, acapacitor bank 2 a 2, a smoothing reactor 2 a 3, a chopper circuit part2 a 4, and a chopper control circuit part 2 a 5. The inverter 2 bincludes an inverter circuit 2 b 1 and an inverter control circuit 2 b2. Here, descriptions of the connection relationship and operationcontents are omitted.

In a conventional ozone gas supply system or a conventional ozonegeneration apparatus, as shown in FIG. 25, merely an electricalconnection or a gas pipe connection is allowed between three dividedblocks of the gas control unit 400, the inverter control unit 500corresponding to the ozone power source, and the ozone generation unit600. Thus, the structure shown in FIG. 9 cannot be achieved.

As shown in FIG. 9, in the ozone generation unit 7X, these three units(400, 500, 600) are assembled together, to achieve considerabledownsizing as compared with the configuration shown in FIG. 25.

In this manner, each of the ozone generation units 7-1 to 7-n isstructured as the ozone generation unit 7X of the embodiment 2 in whichthe ozone generator 1, the ozone power source 2, the MFC 3, the APC 4,the ozone concentration meter 5, and the gas filter 51 are assembledtogether and packaged into one unit.

As a result, as in the embodiment 1, a plurality of the ozone generationunits 7X can be installed within the ozone gas supply system 10, and byconnecting the output pipes of the ozone generation units 7X by the gascontrol valve 9, the supply of the ozone gas can be distributed amongthe respective ozone treatment apparatuses 12 including the ozonetreatment apparatuses 12-1 to 12-n or a large amount of ozone gas or anozone gas having a high concentration can be selectively supplied to oneozone treatment apparatus 12, as described in the embodiment 1.

Thus, the ozone generation unit 7X of the embodiment 2 is formed as anintegrated structure in which the ozone generator 1, the ozone powersource 2, the MFC 3, the gas filter 51, the APC 4, the ozoneconcentration meter 5, the raw gas supply port 14, the ozone gas outputport 15, the cooling water inlet port 13A, and the cooling water outletport 13B are assembled together. This can achieve considerabledownsizing as compared with the similar, conventional configuration.

Additionally, the gas pipe integrated block 30 of the ozone generationunit 7X has the pipe paths R30 a to R30 f that are a plurality ofinternal pipe paths. Therefore, by connecting the pipe paths R30 a toR30 f to the ozone generator 1, the MFC 3, the gas filter 51, the APC 4,the ozone concentration meter 5, the raw gas supply port 14, the ozonegas output port 15, and each of the cooling water inlet/outlet ports 13Aand 13B, the input pipe path for the raw gas Gm described above and theoutput pipe path for the ozone gas described above are formed.Accordingly, downsizing of the part including these pipe paths can beeffectively achieved.

In this manner, by downsizing each of the ozone generation units 7-1 to7-n as the ozone generation unit 7X of the embodiment 2, the ozone gassupply system 10 shown in the embodiment 1 can be achieved at apractical use level.

As a result, as in the embodiment 1, a plurality of the ozone generationunits 7X can be installed within the ozone gas supply system 10, and byconnecting the output pipes of the ozone generation units 7X by the gascontrol valve 9, the supply of the ozone gas can be distributed amongthe respective ozone treatment apparatuses 12 including the ozonetreatment apparatuses 12-1 to 12-n or a large amount of ozone gas or anozone gas having a high concentration can be selectively supplied to oneozone treatment apparatus 12, as described in the embodiment 1.

Embodiment 3

Similarly to the embodiment 2, an embodiment 3 is characterized byfocusing on the ozone generation unit 7 as one unit, and achievingdownsizing of the ozone generation unit 7 in combination with the ozonegas output flow rate management unit 9.

(Control Ozone Gas Output Flow Rate Management Unit)

FIG. 10 is an explanatory diagram showing an internal configuration ofan ozone gas output flow rate management unit based on an ozone gassupply system 20 of the embodiment 3 that corresponds to the ozone gassupply system 10 shown in FIG. 1.

As shown in FIG. 10, in an ozone gas output flow rate management unit 9Yof the embodiment 3 corresponding to the ozone gas output flow ratemanagement unit 9 of the embodiment 1, portions corresponding to therespective ozone generation units 7-1 to 7-n are formed integral withone another. In the following, for convenience of the description, acase of n=3 will be described with reference to FIG. 10.

The ozone gas control valves 9 a to 9 c are integrally providedcorresponding to the ozone generation units 7-1 to 7-n. Mounting blocks93 a to 93 c are provided in close contact with the ozone gas controlvalves 9 a to 9 c. The ozone gas control valve 9 ab, the ozone gascontrol valve 9 bc, and the ozone gas control valve 9 ca are provided atone path side (at the upper side in FIG. 10) of the mounting blocks 93a, 93 b, and 93 c.

The ozone gas control valve 9 ab provided at the one path side of themounting block 93 a is connected to the other path side (the lower sidein FIG. 10) of the mounting block 93 ab via a pipe fitting 98 u, aninter-unit ozone gas pipe 95 ab, and a pipe fitting 98 d. In the samemanner, the ozone gas control valve 9 ab provided at the one path sideof the mounting block 93 ab is connected to the other path side of themounting block 93 ac via a pipe fitting 98 u, an inter-unit ozone gaspipe 95 bc, and a pipe fitting 98 d. The ozone gas control valve 9 caprovided at the one path side of the mounting block 93 ac is connectedto the other path side of the mounting block 93 a via a pipe fitting 98u, an inter-unit ozone gas pipe 95 ca, and a pipe fitting 98 d.

Furthermore, the output is made from output parts (at the right side inFIG. 10) of the mounting blocks 93 a to 93 c through the ozone gasoutput ports 25-1 to 25-n to the outside of the ozone gas supply system20 of the embodiment 3.

Accordingly, the ozone gas output flow rate management unit 9Y has theozone gas control valves 9 a, 9 b, 9 c, 9 bc, 9 ab, and 9 ca with acircuit configuration similar with the ozone gas output flow ratemanagement unit 9.

The ozone gas on/off valves 22-1 to 22-n are interposed between theozone gas output ports 25-1 to 25-n and the ozone treatment apparatuses12-1 to 12-n.

In the ozone gas control valves 9 a, 9 b, 9 c, 9 bc, 9 ab, and 9 ca thatform the ozone gas output flow rate management unit 9Y, the ozone gascontrol valves 9 a, 9 b, and 9 c are of the normally open type (NO), andthe ozone gas control valves 9 bc, 9 ab, and 9 ca are of the normallyclose type (NC).

A control signal S8 a supplied from the system management control part84 of the system collective management unit 8 is given to the ozone gascontrol valve 9 a and the ozone gas control valve 9 ab, and a controlsignal S8 b is given to the ozone gas control valve 9 b and the ozonegas control valve 9 bc, and a control signal S8 c is given to the ozonegas control valve 9 c and the ozone gas control valve 9 ca.

In this manner, the open state and the closed state of the ozone gascontrol valves 9 a, 9 b, 9 c, 9 bc, 9 ab, and 9 ca of the ozone gasoutput flow rate management unit 9Y are controlled based on the controlsignal S8 (S8 a to S8 c) supplied from the system management controlpart 84 of the system collective management unit 8.

In FIG. 10, among the ozone treatment apparatuses 12-1 to 12-n, only oneozone treatment apparatus 12-2 is operated (the ozone gas on/off valve22-2 is in the open state). FIG. 10 shows a state of the ozone gasoutput flow rate management unit 9Y in a case where the flow rate of theozone gas supplied to the ozone treatment apparatus 12-2 is 30 SLM.

In other words, based on the ozone generation unit control signals 86-1to 86-n supplied from the system management control part 84, the ozonegas with a flow rate of 10 SLM is outputted from each of the ozonegeneration units 7-1 to 7-n, and the ozone gas control valves 9 a, 9 b,9 c, 9 bc, and 9 ab are brought into the open state (blacked out) whilethe ozone gas control valve 9 ca is brought into the closed state (shownin white).

On the other hand, among the ozone gas on/off valves 22-1 to 22-n, onlythe ozone gas on/off valve 22-2 is in the open state, while the ozonegas on/off valves 22-1 and 22-n are in the closed state, as describedabove. In a case where only the ozone treatment apparatus 12-2 is usedand the other ozone treatment apparatuses 12 are not used, the ozone gason/off valve 22 is closed. Here, in a case where there is no other ozonetreatment apparatus, pipe portions of the ozone gas outlet ports 25-1and 25-n may be forcibly capped with pipe cap fittings. Moreover,needless to say, in a case where any of the connection pipes 95 ab, 95bc, and 95 ca connecting the ozone generation units is not provided inthe ozone gas supply system 10, any of the pipe fittings 98 u and 98 dis formed as a pipe cap fitting and capped so that the output ozone gasis blocked.

In this manner, the ozone generation units 7-1 to 7-n and the ozone gasoutput flow rate management unit 9Y are controlled so that each of theozone generation units 7-1 to 7-n can supply the ozone gas with a flowrate of 10 SLM. Thereby, the ozone gas can be supplied through the ozonegas output flow rate management unit 9 to the ozone treatment apparatus12-2 with a gas flow rate of 30 SLM.

(Combined Structure of Ozone Generation Unit)

FIG. 11 is a perspective view schematically showing a combined structureof one unit of the ozone generation unit according to the embodiment 2.As shown in FIG. 11, in an ozone generation unit 7Y of the embodiment 2,not only the ozone generator 1, the ozone power source 2, the MFC 3, theozone concentration meter 5, the gas filter 51, the ozone concentrationmeter 5, the APC 4, and the gas pipe integrated block 30, but alsocomponent parts of the ozone gas output flow rate management unit 9 areassembled together.

As shown in FIG. 11, in order to mount the component parts of the ozonegas output flow rate management unit 9 to the gas pipe integrated block30, ozone gas control valve accommodation parts 931 and 932, an ozonegas output part 933, and ozone gas branching parts 934 and 935 areprovided around block main bodies 930 a and 930 b (corresponding to anyof the mounting blocks 93 a to 93 c shown in FIG. 10).

In the ozone gas control valve accommodation part 931, an ozone gascontrol valve 90 x (corresponding to any of the ozone gas control valves9 a to 9 c) is accommodated. In the ozone gas control valveaccommodation part 932, an ozone gas control valve 90 xy (correspondingto any of the ozone gas control valves 9 ab, 9 bc, and 9 ca) isaccommodated. The ozone gas output part 933 corresponds to the ozone gasoutput port 15 of the ozone generation unit 7X of the embodiment 2 shownin FIG. 9, and is connected to the ozone gas output port 25 shown inFIG. 10. The ozone gas branching part 934 functions as a branching part(inter-unit ozone gas pneumatic valve pipe connection port) at the onepath side connected to the pipe fitting 98 u shown in FIG. 10. The ozonegas branching part 935 functions as a branching part (inter-unit ozonegas pneumatic valve pipe connection port) at the other path sideconnected to the pipe fitting 98 d shown in FIG. 10.

In the embodiment 3, similarly to the embodiment 2, all of the gassupply pipe system, the ozone gas output pipe system, and the coolingpipe systems 13A and 13B are assembled together into the single gas pipeintegrated block 30. The component parts of the ozone gas output flowrate management unit 9Y are combined so that pipe paths for a gas supplypipe, an ozone gas output pipe, and a cooling pipe are incorporated inthe gas pipe integrated block 30.

Substantially in the same manner as in the ozone generation unit 7X ofthe embodiment 2, a raw gas input pipe path for a raw gas Gm to besupplied from the raw gas supply port 14 through the MFC 3 to an ozonegenerator input part ET1 of the ozone generator 1 is a path formed bythe raw gas supply port 14, the pipe path R30 a, the in-block passageB3, the MFC 3, the in-block passage B3, the pipe path R30 b, and theozone generator input part ET1 arranged in the mentioned order.

The ozone gas output pipe extending from the ozone generator output partEX1 of the ozone generator 1 through the gas filter 51, the ozoneconcentration meter 5, and the APC 4 to the block main body 930 b is apath formed by the ozone generator output part EX1, the pipe path R30 c,the inside of the gas filter mounting block 31, the gas filter 51, theinside of the gas filter mounting block 31, the pipe path R30 d, thein-block passage B5, the ozone concentration meter 5, the in-blockpassage B5, the pipe path R30 e, the in-block passage B4, the APC 4, thein-block passage B4, the pipe path R30 f, the block main body 930 a(inner portion), the ozone gas control valve 90 x, the pipe path R30 g,and the block main body 930 b (outer portion) arranged in the mentionedorder. Here, the block main bodies 930 a and 930 b may be formedintegral with each other and formed through the gas pipe integratedblock 30.

In the block main body 930 b, there are formed one branch path connectedto the ozone gas branching part 934 through the ozone gas control valve90 xy, an other branch path connected to the ozone gas branching part935, and a joint path in which the one and the other branch paths andthe above-mentioned ozone gas output pipe are joined to form an outputfrom the ozone gas output part 933.

The other parts, pipe paths, and the like, of the configuration areidentical to those of the ozone generation unit 7X shown in FIG. 9, adescription thereof is omitted.

In the ozone gas supply system 20 of the embodiment 3, the plurality ofozone gas control valve accommodation parts 931 and 932 accommodatingthe ozone gas control valves 90 x and 90 xy therein are mounted in tightcontact to the gas pipe integrated block 30 in the corresponding ozonegeneration unit 7Y, and interposed on the output pipe path for the ozonegas described above.

This exerts an effect that, in the ozone gas supply system 20, thecombined structure of the ozone gas output flow rate management unit 9Yand the ozone generation units 7-1 to 7-n can be downsized.

In this manner, in the ozone generation unit 7Y of the embodiment 3 has,in addition to the features of the ozone generation unit 7X of theembodiment 2, most part of the component parts of the ozone gas outputflow rate management unit 9 and the gas pipe integrated block 30 areintegrated to thereby achieve further downsizing as compared with a casewhere the ozone generation unit 7X and the ozone gas output flow ratemanagement unit 9 of the embodiment 2 are separately provided.

Embodiment 4 Basic Configuration: First Aspect

FIG. 12 is a block diagram showing a configuration of an ozone gassupply system according to an embodiment 4 (basic configuration: firstaspect) of the present invention.

(Overall Configuration)

As shown in FIG. 12, an ozone gas supply system 101 has n (≧2) ozonegeneration units 7-1 to 7-n included therein, and has one moistureremoval filter 59 shared by the ozone generation units 7-1 to 7-n. Themoisture removal filter 59 has a function of trapping (removing) a smallamount of water contained in the raw gas that is supplied from the rawgas supply port 14. Thus, in the ozone gas supply system 101 of theembodiment 4, the raw gas supplied from the raw gas supply port 14passes through the moisture removal filter 59, and then supplied to theraw gas supply ports 14-1 to 14-n of the ozone generation units 7-1 to7-n.

In the following, among the ozone generation units 7-1 to 7-n, the ozonegeneration unit 7-2 will be taken as a representative, and an internalconfiguration thereof will be described with reference mainly to FIG.12.

The raw gas is supplied from the raw gas supply port 14 of the ozone gassupply system 101 through the moisture removal filter 59, the raw gassupply port 14-2, and the MFC 3, to the ozone generator 1 in the ozonegeneration unit 7-2. The interior of the ozone generator 1 is filledwith a high-purity gas (raw material gas) containing an oxygen gas. Theozone power source 2 included in the ozone gas supply system 101 applieshigh frequency high voltages HV and LV across electrodes in the ozonegenerator 1, thus causing dielectric-barrier discharge (silentdischarge) between these electrodes. Thereby, due to the discharging,the oxygen gas is dissociated from a gas existing in a discharge spaceto cause an oxygen atom. A chemical bond between this oxygen atom andthe oxygen gas (oxygen molecule) causes an ozone gas as shown in thefollowing formulas (1) and (2). The ozone power source 2 includes aconverter 2 a, an inverter 2 b, and a high voltage circuit part 2 c,which will be described in detail later. In the formula (2), Mrepresents a third body in a triple collision.[Chemical Formula 1]O₂+(silent discharge)

O+O  (1)[Chemical Formula 2]O+O₂+M

O₃  (2)

-   -   (triple-body collision)

The oxygen gas (O₂) of the raw gas and the silent discharge causes achemical reaction as shown in the above-mentioned formulas (1) and (2),to generate an ozone gas (O₃). The raw gas contains not only the oxygengas but also about 1 to 2 PPM (10¹⁴/cm³) impurities such as a nitrogengas (N₂). A moisture content in the raw gas is about 1 PPM (10¹⁴/cm³) to10 PPM (10¹⁵/cm³) as shown in FIG. 26, because the dew point of the gasis normally managed to be about −70° C. FIG. 26 is an explanatorydiagram showing the relationship between the dew point of the raw gasand the moisture content in the raw gas. Also in the nitrogen gas andmoisture, a molecule gas is dissociated due to the silent discharge, sothat gases such as a nitrogen oxide, a hydroxide, and a hydrazine (N₂H₄)compound that is a compound of nitrogen and hydrogen are generated inthe ozone gas generator, and outputted together with the ozone gas.

From these compound gases, an active gas is generated throughparticularly a process as shown in the following formulas (3) to (7).The active gas is very active so that a corrosion chemical reaction on ametal surface occurs at portions, in contact with the ozone gas, of thepipe path for extracting the ozone gas, the APC 4, the MFC 3, the gasopening/closing valve (valve), and the like. Thus, heat generation andmetal corrosion occurs in the components, which causes breakdown of theabove-mentioned components and the like. Moreover, the outputted ozonegas itself becomes a gas containing a large amount of metalcontamination caused as a result of the metal corrosion. Thus, thequality of the ozone gas is deteriorated.[Chemical Formula 3]H₂O+(silent discharge)

2H⁺+O²⁻  (3)[Chemical Formula 4]2H⁺+O₂+NO⁻+(silent discharge)

HNO₃(nitric acid cluster)  (4)[Chemical Formula 5]O₂+O₃+(silent discharge)

O(¹D)+2O₂  (5)[Chemical Formula 6]O(¹D)+H₂O+(silent discharge)

2OH(OH radical)  (6)[Chemical Formula 7]O₃+H₂O+(silent discharge)

HO₃+OH⁻(OH radical ion)  (7)

As described above, through the chemical reaction shown in the formulas(3) and (4), a nitric acid cluster gas (HNO₃) is generated by awater-splitting reaction, and through the chemical reaction shown in theformulas (5) to (7), an OH radical gas is generated.

Due to the moisture contained in the raw gas, the nitric acid clustergas, the OH radical, the OH radical ion, and the like, that are shown inthe chemical formulas (3) to (7) mentioned above are very active, arelatively long-lived gas is generated in the ozone generator 1, andoutputted together with the generated ozone gas. It has become apparentfrom an experiment and the like, that this causes a corrosion chemicalreaction on a metal surface to occur at portions, in contact with theozone gas, of the pipe path, the APC 4, the MFC 3, the gasopening/closing valve, and the like, to consequently cause heatgeneration and metal corrosion of the components so that breakdown ofthe above-mentioned components and the like occurs. Therefore, it hasbecome apparent that reducing the moisture content in the raw gassupplied to the ozone gas is important in order to reduce the amount ofthese active gases generated.

The impurities such as the nitrogen gas contained in the raw gas and themoisture content therein are, in a normal state, determined by theamount of ingredients in the gas. However, in an apparatus actuallyrunning, a nitrogen gas and a moisture is adhering also to a pipe of agas supply part or the like at a time of starting the operation of theapparatus or at a transition time for a maintenance or the like. Ifthese adhering nitrogen gas and moisture discharged together with theraw gas, an amount of impurities and moisture content exceeding 1 to 2PPM enters the ozone generator 1. As a result, the gases having theadverse effects described above are contained in the ozone gas andoutputted.

In view of the above-described points, it has been found that it is veryeffective to provide the moisture removal filter 59 for removing, byadsorption or the like, a moisture in the raw gas supply near the rawgas supply port 14 in the ozone gas supply system 101, in order toremove the moisture contained in the raw gas that is supplied to theozone generator 1. The moisture removal filter 59 is achieved by using asilica gel or heating of a heater for the adsorption.

As the capability of the moisture removal filter 59, the moistureremoval filter 59 capable of reducing the moisture content in the rawgas to less than 300 PPB produced a preferable result.

In this embodiment, as a structure of the ozone generator 1, an ozonegenerator structured to employ the silent discharge is described as arepresentative. Here, for an ozone generation function, there may beadopted an ozone generator structured to employ creeping discharge orglow discharge, an ozone generator structured to employ super-highfrequency or microwave discharge, or an ozone generator employingelectrolytic medium. These ozone generators may be adopted.

In order to obtain a stable output of the ozone, it is important tolimit gas types of the raw gas supplied to the ozone generator 1, andparticularly to suppress a moisture content in the raw gas, and also itis important to provide a function for constantly adjustingenvironmental conditions such as a flow rate value, the gas pressure inthe ozone generator, the temperature of water for cooling theelectrodes, the amount of water, and the like.

To be specific, the moisture removal filter 59 is used to suppress themoisture content in the raw gas. The MFC 3 is used to adjust the flowrate value. The APC 3 is used to adjust the gas pressure in the ozonegenerator 1. The cooling function exerted by the cooling water suppliedfrom the cooling water inlet ports 13 a-1 to 13 a-n is used to makeconstant the environmental conditions such as the temperature of waterfor cooling the electrodes, the amount of water, and the like. Controlmeans (the MFC 3, the APC 4, the ozone concentration meter 5, and thegas filter 51) having such a function will be described below.

The raw gas having a predetermined raw gas flow rate Q is obtained fromthe raw gas supply port 14 of the ozone gas supply system 101, themoisture removal filter 59, and the raw gas supply port 14-2 of theozone generation unit 7-2, and supplied to the ozone generator 1 with aconstant flow rate through the gas flow rate controller (MFC) 3.

An ozone generator system is equipped with, as means for keeping thepressure in the ozone generator 1 constant, means for detecting a gaspressure in the generator and a function for finely adjusting the amountof ozone gas to be outputted to the generator thus detected and therebykeeping the pressure in the ozone generator 1 constant. One of methodstherefor is implemented by an automatic pressure adjuster (APC) 4 forautomatically adjusting the pressure in the generator to a predeterminedpressure. The automatic pressure adjuster (APC) 4 is provided in anozone gas output pipe gas line of the ozone generator.

A specific configuration of the ozone gas output pipe gas line is asfollows. An ozone gas generated in the ozone generator 1 passes througha gas filter 51 for removing impurities and foreign substancestherefrom, and then through an ozone concentration meter 5 and theautomatic pressure adjuster (APC) 4 for automatically adjusting thepressure in the generator to a predetermined pressure. Thereby, theozone (ozonized oxygen) gas having a predetermined ozone concentration Cis continuously outputted from the ozone gas output port 15-2 to theoutside of the ozone generation unit 7-2.

Sometimes, an ozone-gas flow rate controller (MFC) for keeping the flowrate of the output ozone gas constant is provided in the ozone gasoutput pipe gas line. In this embodiment, no ozone-gas flow ratecontroller (MFC) is provided.

Accordingly, a flow rate Qx of the output ozone gas is the sum of anozone flow rate Qc and an flow rate Qn. The ozone flow rate Qc is forthe ozone obtained as a result of conversion from the raw gas

flow rate Q. The flow rate Qn is for a raw material oxygen that has notbeen converted from the raw gas

flow rate Q. That is, the flow rate Qx of the ozone (ozonized oxygen)gas is determined by the formula (A): {Qx=F(Q,C) . . . (A)} which isbased on the flow rate Q and the ozone concentration C of a raw material(oxygen) gas.

By the gas flow rate controller (MFC) 3, the flow rate of the raw gassupplied to the ozone generator is controlled to a constant value.

The APC 4 controls the pressure of the ozone gas flowing in an outputpipe path for the ozone gas of the ozone generator 1, and therebyautomatically controls the gas pressure of the ozone generator 1 to aconstant value.

The ozone generation unit 7-2 is configured as a package unit as oneunit in which a plurality of function means are assembled together, suchas the ozone generator 1 having means for generating the ozone gas, theozone power source 2 having means for supplying predetermined power tothe ozone gas, the MFC 3 having means for controlling the flow rate ofthe supplied raw gas to a constant value, the APC 4 having means forcontrolling a pressure value of the pressure in the ozone generator 1 toa constant value, the gas filter 51 having means for trapping theimpurity gas of the output ozone gas, and the ozone concentration meter5 having means for detecting an output ozone concentration value. Allthe ozone generation units 7-1 to 7-n have identical configurations(only the configuration of 7-2 is shown), and have the internalconfiguration described for the ozone generation unit 7-2 as arepresentative.

The MFC 3, the APC 4, the ozone concentration meter 5, and the gasfilter 51 constitute the control means associated with the ozonegenerator 1. In terms of supplying a stable ozone gas, it is desirablethe control means includes at least two means among the MFC 3, the APC4, the ozone concentration meter 5, and the gas filter 51.

Each of the ozone generation units 7 (ozone generation units 7-1 to 7-n)has a water leakage sensor 6 provided on a bottom surface thereof, tomonitor presence or absence of water leakage of each ozone generationunit 7. More specifically, information obtained from the water leakagesensor 6 is supplied to an EMO circuit (emergency stop circuit) 81 in asystem collective management unit 8, so that the monitoring can be madeunder control of a system management control part 84.

The system collective management unit 8 provided in the ozone gas supplysystem 101 receives detection information from each of an exhaust gassensor 23 and an ozone leak sensor 24. The exhaust gas sensor 23monitors and keeps a negative pressure state of the interior of theapparatus by vacuuming the interior through an exhaust duct 11. When thesystem collective management unit 8 receives an abnormal exhaust or anabnormal leakage from the exhaust gas sensor 23 or the ozone leak sensor24, respectively, the system collective management unit 8 causes thesystem management control part 84 to supply ozone generation unitcontrol signals 86-1 to 86-n that are stop instructions to all the ozonegeneration units 7-1 to 7-n, to thereby stop operations of the ozonegeneration units 7-1 to 7-n.

Also, the system management control part 84 provided in the systemcollective management unit 8 receives process ozone gas event signals16-1 to 16-n from ozone treatment apparatuses 12-1 to 12-n through auser information I/F 83. The process ozone gas event signals 16-1 to16-n include a request ozone flow rate Qs12 and a request ozoneconcentration Cs12.

Based on instructions indicated by the process ozone gas event signals16-1 to 16-n, the system management control part 84 outputs the ozonegeneration unit control signals 86-1 to 86-n to the ozone generationunits 7-1 to 7-n, and also outputs a control signal S8 to an ozone gasoutput flow rate management unit 9.

As a result, the flow rate and the concentration of an ozone gasoutputted from each of the ozone generation units 7-1 to 7-n arecontrolled, and additionally the opening/closing of an ozone gas controlvalve 9 a and the like provided in the ozone gas output flow ratemanagement unit 9 is controlled. Thereby, an ozone gas having a gas flowrate and a gas concentration in accordance with the instructions of theprocess ozone gas event signals 16-1 to 16-n can be supplied to theozone treatment apparatuses 12-1 to 12-n. In the following, the systemcollective management unit 8 will be described in more detail.

The system collective management unit 8 includes the EMO circuit 81 forstopping the apparatus in emergency, an unit information I/F 82, theuser information I/F 83, the system management control part 84, and amain control panel 85.

As described above, the EMO circuit 81 is a circuit for monitoring asystem error signal obtained from the water leakage sensor 6 of eachozone generation unit 7. To be more specific, when the EMO circuit 81receives detection information indicating detection of abnormal waterleakage from the water leakage sensor 6, the EMO circuit 81 transmitsthis information to the system management control part 84. Then, thesystem management control part 84 supplies the ozone generation unitcontrol signal 86 (any one of the ozone generation unit control signals86-1 to 86-n) to the ozone generation unit 7 corresponding to the waterleakage sensor 6 that has detected the abnormal water leakage. Thus, theozone generation unit 7 is stopped.

The unit information I/F 82 has a function for receiving unitinformation signals 17-1 to 17-n from the ozone generation units 7-1 to7-n.

As described above, the user information I/F 83 has a function forreceiving the process ozone gas event signals 16-1 to 16-n (indicatingthe request ozone flow rate Qs12, the request ozone concentration Cs12,operation information Y, an apparatus No., and the like), which arecommand signals, from the ozone treatment apparatuses 12-1 to 12-n.

The system management control part 84 outputs the control signal S8which is a command for controlling the opening/closing of the ozone gascontrol valves (9 a, 9 b, 9 c, 9 ab, 9 bc, 9 ca) provided in the ozonegas output flow rate management unit 9, and thereby collectivelycontrols the parts within the ozone gas output flow rate management unit9. The system management control part 84 also has a function forreceiving information from the main control panel 85.

As shown in FIG. 12, the ozone gas supply system 101 includes a coolingwater inlet port 13A and a cooling water outlet port 13B. Cooling wateris introduced from an external cooling system (not shown) through thecooling water inlet port 13A and cooling water inlet ports 13 a-1 to 13a-n into the ozone generation units 7-1 to 7-n. The water having servedfor the cooling is outputted from the ozone generation units 7-1 to 7-nthrough cooling water outlet ports 13 b-1 to 13 b-n and the coolingwater outlet port 13B to the outside.

The amount and the temperature of the cooling water supplied from theexternal cooling system are controlled to constant values, thoughdetails thereof will not be described here.

The ozone gas supply system 101 has the raw gas supply port 14. The rawgas is introduced from the outside into the ozone generation units 7-1to 7-n through the raw gas supply port 14, the moisture removal filter59, and the raw gas supply ports 14-1 to 14-n.

The ozone gas output ports 15-1 to 15-n of the ozone generation units7-1 to 7-n are connected to the ozone gas output flow rate managementunit 9 within the ozone gas supply system 101, and the ozone gas isoutputted from the ozone gas output flow rate management unit 9 throughozone gas output ports 25-1 to 25-n to the outside of the ozone gassupply system 101.

The process ozone gas event signals 16-1 to 16-n outputted from the nozone treatment apparatuses 12-1 to 12-n are inputted to the systemmanagement control part 84 via the user information I/F 83. The processozone gas event signal 16 (16-1 to 16-n) indicates the request ozoneflow rate Qs12, the request ozone concentration Cs12, the operationinformation Y, and the like. The system management control part 84 has afunction for outputting the ozone generation unit control signals 86-1to 86-n for controlling the ozone generation units 7-1 to 7-n based onthe process ozone gas event signals 16-1 to 16-n.

The ozone generation units 7-1 to 7-n include ozone generation unitcontrol panels 85-1 to 85-n. The unit information signals 17-1 to 17-nare transmitted from the ozone generation units 7-1 to 7-n to the systemmanagement control part 84 via the unit information I/F 82 of the systemcollective management unit 8. The unit information signal 17 (17-1 to17-n) is an information signal indicating the breakdown and anoperating/stopping state of the ozone generator 1 included in each ozonegeneration unit 7.

The operation information Y included in the process ozone gas eventsignal 16 corresponds to a user information signal indicating thebreakdown and an operating/stopping state of each ozone treatmentapparatus 12 (12-1 to 12-n), and, as described above, outputted to theuser information I/F 83 of the system collective management unit 8.

Each of the ozone generation units 7-1 to 7-n includes an ozone controlpart 19. The ozone control part 19 is a control part, as will bedetailed later, that receives a set flow rate Qs and a detected flowrate Q for the flow rate of the raw gas, a set pressure Ps and adetected pressure P for the pressure of the ozone generator 1, and theozone concentration C of the ozone outputted from each ozone generationunit 7, and that controls the ozone power source 2 to thereby controlthe ozone concentration, the gas flow rate, and the like, of the ozonegas generated in the ozone generator 1. The ozone control part 19communicates signals with the ozone concentration meter 5, the MFC 3,the APC 4, and the ozone power source 2.

(Control of Ozone Gas Output Flow Rate Management Unit)

The configuration and the operation of the ozone gas output flow ratemanagement unit 9 of the ozone gas supply system 101 are the same asthose of the ozone gas output flow rate management unit 9 of the ozonegas supply system 10 according to the embodiment 1 shown in FIG. 2.Therefore, a description thereof is omitted.

(Main Control Panel)

The main control panel 85 of the ozone gas supply system 101 is the sameas the main control panel 85 of the ozone gas supply system 10 accordingto the embodiment 1 shown in FIG. 3. Therefore, a description thereof isomitted

(Ozone Control Part (Data Memory 1S6))

The configuration and the operation of the ozone control part 19 of theozone gas supply system 101, including the data memory 1S6, are the sameas those of the ozone control part 19 and the data memory 1S6 of theozone gas supply system 10 according to the embodiment 1 shown in FIG. 4to FIG. 7. Therefore, a description thereof is omitted as appropriate.

(Effects, etc.)

In the embodiment 4 described above, the moisture removal filter 59 ismounted to the raw gas supply port 14, and one ozone gas supply system101 includes the plurality of ozone generation units 7-1 to 7-n, andeach ozone generation unit 7 includes the ozone generator 1 having themeans for generating the ozone gas, the ozone power source 2 having themeans for supplying and controlling power to be supplied for ozonegeneration, the MFC 3 having the means for controlling the flow rate Qof the raw gas or the ozone gas to be a constant value, the APC 4 forautomatic control having the means for controlling the pressure P in theozone generator 1 to be constant, and the ozone concentration meter 5having the means for detecting the output ozone concentration value C.

In the ozone gas supply system 101, the ozone gas output flow ratemanagement unit 9 is provided in which the on/off valve (ozone gascontrol valves 9 a to 9 c) is arranged corresponding to the output ozonegas pipe of each ozone generator 1, and additionally the on/off valve (9bc, 9 ab, 9 ca) is arranged between the output ozone gas pipes of therespective ozone generators 1.

The ozone gas supply system 101 of the embodiment 4 includes the systemcollective management unit 8 (ozone gas output flow rate managementunit) that can control the ozone gas output flow rate so that one or acombination of two or more of the plurality of ozone gas outputs fromthe ozone generation units 7-1 to 7-n can be selectively outputted toany of the ozone treatment apparatuses 12-1 by the opening/closingoperation of the ozone gas control valves 9 a, 9 b, 9 c, 9 bc, 9 ab, and9 ca provided in the ozone gas output flow rate management unit 9.

Accordingly, due to the moisture removal filter 59 provided in the ozonegas supply system 101, the moisture content in the raw gas supplied fromthe raw gas supply port 14 can be reduced from about 1 to 10 PPM toabout 10 to 100 PPB. This can reduce the active gases generated togetherwith the ozone generation due to the moisture, the impurities, and thesilent discharge, such as the nitric acid cluster (HNO₃) gas, the OHradical gas, the OH radical ion gas, and the HO₃ ⁺ ion gas. This canconsequently suppress wear or breakdown of the APC 4, the MFC 3, and theozone concentration meter 5 (ozone monitor) provided at the ozone gasoutput part of the ozone generator 1, the gas opening/closing valve(valve), and the ozone treatment apparatuses 12-1 to 12-n, which may beotherwise caused by the active gases such as the nitric acid ion cluster(HNO₃) gas, the OH radical gas, and the HO₃ ⁺ ion gas.

Moreover, a high-quality ozone gas containing a small amount of thenitric acid cluster (HNO₃), the OH radical gas, and the metalcontamination can be provided as the outputted ozone gas.

In this manner, in the ozone gas supply system 101 of the embodiment 4,the moisture removal filter 59 is provided having the function capableof trapping a small amount of moisture contained in the raw gas that issupplied to the raw gas supply port 14. This exerts an effect that themoisture content in the raw gas supplied to the ozone generator 1 isreduced to less than 300 PPB by the moisture removal filter 59 tothereby achieve a supply of a high-quality ozone gas.

As described above, in the ozone gas supply system 101 of the embodiment5, the moisture removal filter 59 is mounted. As a result, the ozone gashaving a higher dew point is provided, and additionally, the mountedmoisture removal filter 59 can remove the moisture content. This exertsan effect that a time for flowing a purge gas prior to the ozone gasgeneration can be considerably shortened so that a time for the start upof the apparatus can be considerably shortened.

Moreover, by bringing the ozone gas control valves 9 a, 9 b, and 9 cinto the open state, bringing the ozone gas control valves 9 ab, 9 bc,and 9 ca into the closed state, and bringing the ozone gas on/off valves22-1 to 22-n into the open state so that the ozone gas can be suppliedfrom the ozone generation units 7-1 to 7-n to the ozone treatmentapparatuses 12-1 to 12-n that are in one-to-one correspondence with eachother, the flow rate and the ozone gas concentration of the ozone gassupply can be independently controlled in each of the ozone treatmentapparatuses 12-1 to 12-n.

In the ozone gas supply system 101 of the embodiment 4, similarly to theembodiment 1, as shown in FIGS. 2 and 3, by supplying a combination oftwo or more ozone gas outputs to one ozone treatment apparatus (ozonetreatment apparatus 12-2), the ozone gas can be supplied with variousgas flow rates and concentrations.

Moreover, even if trouble occurs in a part of the ozone generation units7-1 to 7-n, the other ozone generation units 7 that are normallyoperating can supply the ozone gas to any of the ozone treatmentapparatuses 12-1 to 12-n. Therefore, an ozone gas supply with a highreliability can be achieved, and additionally a high-quality ozone gascan be provided in which a small amount of the active gas is containedin the output ozone gas.

In this manner, the ozone gas supply system 101 of the embodiment 4,similarly to the ozone gas supply system 10 of the embodiment 1,controls the ozone gas output flow rate management unit 9 based on thecontrol signal S8 supplied from the system management control part 84,to perform a combination/selection process for combining and selectingozone gas outputs from the ozone generation units 7-1 to 7-n, so thatthe ozone gas can be outputted to the ozone treatment apparatus 12 witha desired gas flow rate and a desired ozone gas concentration.

In the ozone gas supply system 101 of the embodiment 4, the ozone gascontrol valves 9 a, 9 b, 9 c, 9 bc, 9 ab, and 9 ca provided in the ozonegas output flow rate management unit 9 can be electrically-operatedvalves or pneumatic valves that are openable and closable by means ofelectricity or air pressure, so that the gas flow rate and the ozone gasconcentration of the ozone gas outputted from the ozone generator 1 ofeach ozone generation unit 7 to the outside can be centrally managedunder control of the control signal S8.

The system collective management unit 8 includes the water leakagesensor 6, the EMO circuit 81, the unit information I/F 82, the systemmanagement control part 84, and the like. Thereby, in a case where anemergency stop or water leakage is detected in any of the ozonegeneration units 7-1 to 7-n, the corresponding said ozone generationunit can be stopped.

Furthermore, the exhaust gas sensor 23, the ozone leak sensor 24, thesystem management control part 84, and the like, are provided. Thereby,in a case where an abnormal exhaust or ozone abnormal leakage isdetected in the system as a whole, all the ozone generation units 7-1 to7-n can be stopped.

In this manner, the ozone gas supply system 101 (first aspect) of theembodiment 4 has a safety shutdown function in case of trouble of eachozone generation unit 7, trouble of the entire ozone gas supply system101, and the like. Thus, a system with a high security can be achieved.

Second Aspect of Embodiment 4

In a second aspect of the embodiment 4, similarly to the embodiment 2shown in FIGS. 8 and 9, each of the ozone power source 2 and the ozonegenerator 1 is downsized. Not only the compactified ozone power source 2having the means for supplying power and controlling the amount of powerand the compactified ozone generator 1 having the means for generatingthe ozone gas, but also the MFC 3 having the means for controlling theflow rate of the raw gas, the ozone gas filter 51 having the means forremoving impurities in the ozone gas, the ozone concentration meter 5having the means for detecting the output ozone gas concentration, andthe APC 4 having the means for controlling the gas pressure in the ozonegenerator to be a constant value, are assembled together and packaged,thereby achieving the ozone generation unit 7X serving as one unit in astructural sense, too.

(Compactification of Ozone Power Source 2)

In the embodiment 4, too, by adopting the circuit configuration of theembodiment 1 shown in FIG. 8, a circuit configuration compactified byintegrating main components of the ozone generator 1 and the ozone powersource 2 with each other, can be achieved.

(Combined Structure of Ozone Generation Unit)

In the embodiment 4, similarly to the embodiment 1 shown in FIG. 9, theozone generation unit 7X as one unit can be achieved in which the ozonegenerator 1, the ozone power source 2, the MFC 3, the gas filter 51, theozone concentration meter 5, the APC 4, and the gas pipe integratedblock 30 are assembled together.

In a conventional ozone gas supply system or a conventional ozonegeneration apparatus, as shown in FIG. 25 described in the embodiment 1,merely an electrical connection or a gas pipe connection is allowedbetween three divided blocks of the gas control unit 400, the invertercontrol unit 500 corresponding to the ozone power source, and the ozonegeneration unit 600. Thus, the structure shown in FIG. 9 cannot beachieved.

Moreover, since the raw gas included in an installed utility is directlysupplied to the ozone gas supply system, there is no means forsuppressing the moisture content in the raw gas that is supplied to theozone generator, which cause a high rate of breakdown of a gas controlequipment provided in the ozone gas output part.

In the second aspect of the embodiment 4, similarly to the embodiment 1,as shown in FIG. 9, in the ozone generation unit 7X, these three units(400, 500, 600) are assembled together, to achieve considerabledownsizing as compared with the configuration shown in FIG. 25.Additionally, since the moisture removal filter 59 is mounted to the rawgas supply port 14 of the ozone gas supply system 101 shown in FIG. 12,the rate of breakdown of the gas control equipment provided in the ozonegas output part can be lowered, so that a high-quality ozone gas can beprovided.

In this manner, similarly to the embodiment 1, each of the ozonegeneration units 7-1 to 7-n of the embodiment 4 is structured as theozone generation unit 7X in which the ozone generator 1, the ozone powersource 2, the MFC 3, the APC 4, and the ozone concentration meter 5 areassembled together and packaged into one unit.

As a result, as in the embodiment 4, a plurality of the ozone generationunits 7X can be installed within the ozone gas supply system 10, and byconnecting the output pipes of the ozone generation units 7X by the gascontrol valve 9, the supply of the ozone gas can be distributed amongthe respective ozone treatment apparatuses 12 including the ozonetreatment apparatuses 12-1 to 12-n or a large amount of ozone gas or anozone gas having a high concentration can be selectively supplied to oneozone treatment apparatus 12, as described in the embodiment 4.

Third Aspect of Embodiment 4

In a third aspect of the embodiment 4, similarly to the embodiment 3shown in FIGS. 10 and 11, the ozone generation unit 7 as one unit isfocused on, and downsizing of the ozone generation unit 7 in combinationwith the ozone gas output flow rate management unit 9 can be achieved.

(Control of Ozone Gas Output Flow Rate Management Unit)

The third aspect of the embodiment 4 can be achieved by adopting theozone gas supply system 20 of the embodiment 3 shown in FIG. 10 as aconfiguration corresponding to the ozone gas supply system 101 shown inFIG. 12.

(Combined Structure of Ozone Generation Unit)

The third aspect of the embodiment 4 can be achieved by configuring eachof the ozone generation units 7-1 to 7-n of the ozone gas supply system101 as the ozone generation unit 7Y of the embodiment 3 shown in FIG.11.

Embodiment 5

FIG. 13 is a block diagram showing a configuration of an ozone gassupply system according to an embodiment 5 of the present invention.

In an ozone gas supply system 102 of the embodiment 5, similarly to theozone gas supply system 101 of the embodiment 4, moisture removalfilters 59-1 to 59-n are provided for the purpose of trapping a moisturecontained in the raw gas that is supplied through the raw gas supplyport 14 into the configuration of the ozone gas supply system 102.However, the moisture removal filters 59-1 to 59-n are provided inone-to-one correspondence with the ozone generation units 7-1 to 7-n,and provided near the inlet portions of the raw gas supply parts of theozone generation units 7-1 to 7-n, respectively. Each of the moistureremoval filters 59-1 to 59-n suppresses a moisture content in the rawgas supplied to each of the ozone generation units 7-1 to 7-n, so thatthe quality of the ozone gas generated in each of the ozone generationunits 7-1 to 7-n is increased. In this manner, in the ozone gas supplysystem 102 of the embodiment 5, the raw gas supplied from the raw gassupply port 14 passes through the moisture removal filters 59-1 to 59-n,and then is supplied to the raw gas supply ports 14-1 to 14-n of theozone generation units 7-1 to 7-n.

Particularly, in the ozone generation units 7-1 to 7-n of the embodiment5, the moisture removal filter 59 (any of the moisture removal filters59-1 to 59-n) for trapping a moisture contained in the gas is mounted tothe raw gas inlet portion of one unit of the ozone generation unit 7,and, similarly to the embodiment 2, downsizing of the ozone generationunit 7 is achieved by the combined structure.

(Raw Gas Purity Management)

FIG. 14 is a perspective view schematically showing a combined structureof an ozone generation unit 7X2 as one unit according to the embodiment5.

As shown in FIGS. 13 and 14, at the raw gas supply ports 14-1 to 14-n ofthe ozone generation units 7-1 to 7-n, the moisture removal filter 59(59-1 to 59-n) is mounted at a position that allows easy replacement,and integrally formed. In the following, for convenience of thedescription, a case of n=3 will be described as an example, withreference to FIG. 13.

The moisture is contained in the air, too. Therefore, when a part of thepipes in the raw gas pipe path is opened to the air, a moistureimmediately adsorbs to a pipe surface. If the raw gas flows in the rawgas pipe to which the moisture adsorbs, not only the moisture containedin the high-purity raw gas but also the moisture adhering to the pipeare separated by the gas flow, so that the dew point of the supplied rawgas rises as shown in FIG. 26. Sometimes, the moisture content in theraw gas may be increased to 10 PPM or more.

If a moisture or an impurity gas such as a nitrogen-based gas, acarbon-based gas, or a sulfide gas is contained in the raw gas, not onlythe ozone gas but also N radical and OH radical gases are generated bydischarging. These radical gases are combined with the moisture, thusoutputting the ozone gas that contains cluster molecule gases of nitricacid and OH radical.

Since these cluster molecule gases of nitric acid and OH radical arevery active gases, a chemical reaction occurs on a metal surface of theozone-gas output gas pipe, the valve, or the like, to cause corrosion ofthe pipe surface. This may cause a corroded-metal impurity (metalcontamination) to be contained in the output ozone gas.

Increase in the amount of the metal impurity (metal contamination)contained in the output ozone gas deteriorates the performance of anoxide film that is formed on a semiconductor by an oxide film processusing the ozone gas.

From the above, it has been confirmed from tests that the quality of anoutput ozone gas is deteriorated if a large amount of moisture iscontained in the raw gas. Accordingly, the moisture removal filters 59-1to 59-n for the purpose of moisture removal are mounted to a raw gassupply portion. Particularly, in the embodiment 5, at the raw gas supplyports 14-1 to 14-n of the ozone generation units 7-1 to 7-n, themoisture removal filter filters 59-1 to 59-n are mounted at positionsthat allow easy replacement, so that the raw gas is supplied to theozone generator 1 with removal of the moisture.

Moreover, even if trouble occurs in a part of the moisture removalfilters 59-1 to 59-n of the ozone generation units 7-1 to 7-n, the otherozone generation units 7 to which the other moisture removal filters 59that are normally operating are mounted can supply the ozone gas to anyof the ozone treatment apparatuses 12-1 to 12-n. Therefore, an ozone gassupply with a high reliability can be achieved, and additionally ahigh-quality ozone gas can be provided in which a small amount of theactive gas is contained in the output ozone gas.

In this configuration, the moisture removal filters 59-1 to 59-n areprovided in one-to-one correspondence with the ozone generation units7-1 to 7-n. However, depending on a type of the impurity gas, aplurality of gas filters may be provided in series and at multiplestages, or an impurity gas filter and a moisture trapping gas filter maybe provided in series and at multiple stages.

The other parts, pipe paths, and the like, of the configuration aresubstantially identical to those of the ozone generation unit 7X of theembodiment 2 shown in FIG. 9. Therefore, a description thereof isomitted as appropriate, and a description will be given mainly to pointsdifferent from the ozone generation unit 7X.

As shown in FIG. 14, a raw gas pipe system (the raw gas supply port14+the moisture removal filter 59) and an output gas pipe system (ozonegas output port 15) are integrated into a gas pipe integrated block 30as a gas pipe integrated block structure. Thereby, the ozone generator1, the ozone power source 2, and the gas pipe systems are packaged, andthus the ozone generation unit 7X2 can be further downsized. The raw gassupply port 14 and the moisture removal filter 59 are coupled to eachother.

A raw gas input pipe path for a raw gas Gm to be supplied from the rawgas supply port 14 through the MFC 3 to an ozone generator input partET1 of the ozone generator 1 is a path formed by the raw gas supply port14, the moisture removal filter 59, the pipe path R30 a, the in-blockpassage B3, the MFC 3, the in-block passage B3, the pipe path R30 b, andthe ozone generator input part ET1 arranged in the mentioned order. Atthis time, a region of the ozone generator 1 around the ozone generatorinput part ET1 is mounted to the gas pipe integrated block 30 by theozone generator mounting bolt Bt1. In this manner, the input pipe pathfor the raw gas Gm is formed using the gas pipe integrated block 30.

Similarly to the embodiment 5, the moisture removal filter 59 (moistureremoval filters 59-1 to 59-n) is mounted at a position that allows easyreplacement and in connection with the raw gas supply port 14 providedat a rear surface of the ozone generation units 7-1 to 7-n. As a result,the ozone gas having a higher dew point is provided, and additionally,the mounted moisture removal filter 59 can remove the moisture content.This exerts an effect that a time for flowing a purge gas prior to theozone gas generation can be considerably shortened so that a time forthe start up of the apparatus can be considerably shortened.

Embodiment 6

FIG. 15 is a block diagram showing a configuration of an ozone gassupply system according to an embodiment 6 of the present invention.

The embodiment 6 is “focusing on the ozone generation unit 7 as one unitcorresponding to each of the ozone generation units 7-1 to 7-n, andachieving downsizing of the ozone generation unit 7” of the embodiment2. Particularly, the MFC 3 provided at the raw gas input part of theozone generator 1 of the embodiment 5 is removed, and instead, an MFC 53serving as flow-rate control means is arranged at the ozone gas outputpart for the output of the ozone gas generated by the ozone generator 1,thus achieving downsizing of the ozone generation unit 7.

(Ozone-Gas Flow-Rate Control)

An ozone gas supply system 103 of the embodiment 6 shown in FIG. 15corresponds to the ozone gas supply system 101 of the embodiment 4 shownin FIG. 12. FIG. 16 is a perspective view schematically showing acombined structure of an ozone generation unit as one unit according tothe embodiment 6.

As shown in FIGS. 15 and 16, the embodiment 6 is an embodiment in which,in terms of the function, the MFC 3 serving as the gas-flow-rate controlmeans provided in the raw gas supply part in the embodiment 1, theembodiment 4, and the embodiment 5 is moved, as the MFC 53, to the pipesystem for the generated ozone gas. In other words, comparing the ozonegas supply system 103 of the embodiment 6 and the ozone gas supplysystem 101 of the embodiment 4 shown in FIG. 12, a different point isthat the MFC 3 is eliminated while the MFC 53 is newly interposedbetween the ozone concentration meter 5 and the APC 4, and furthermorethe moisture removal filter 59 is not provided. The operation, and thelike, of the apparatus are substantially identical to those of theembodiment 1, the embodiment 4, and the embodiment 5. Therefore, adescription thereof is omitted.

In this manner, in an ozone generation unit 7X3 of the embodiment 6, theozone generator 1 and the like are mounted in close contact with the gaspipe integrated block 30. In the following, a description will be givento the pipe paths in the ozone generation unit 7X3 which utilizes thegas pipe integrated block 30 shown in FIG. 16. In the gas pipeintegrated block 30, pipe paths R30 c to R30 f are provided. The coolingwater inlet port 13A, the cooling water outlet port 13B, the raw gassupply port 14, and the ozone gas output port 15 are mounted to the sidesurfaces of the gas pipe integrated block 30. The ozone generator 1 ismounted to the gas pipe integrated block 30 using ozone generatormounting bolts Bt1 to Bt4.

The APC 4 is interposed between APC mounting blocks 34, 34 and therebymounted to the gas pipe integrated block 30. The MFC 53 is interposedbetween an APC mounting block 34 and an MFC mounting block 153 andthereby mounted to the gas pipe integrated block 30. The ozoneconcentration meter 5 is interposed between ozone concentration metermounting blocks 35, 35 and thereby mounted. In these mounting blocks 33,34, 153, and 35, in-block passages B3, B4, B53, and B5 for ensuring thepipe paths are formed. The gas filter 51 is mounted to the gas pipeintegrated block 30 by using a gas filter mounting block 31.

The raw gas supply port 14 to which the raw gas Gm is supplied isdirectly provided to an ozone generator input part ET1 of the ozonegenerator 1, and an input pipe path is a path formed by the raw gassupply port 14 and the ozone generator input part ET1 in the mentionedorder. At this time, a region of the ozone generator 1 around the ozonegenerator input part ET1 is mounted to the gas pipe integrated block 30by the ozone generator mounting bolt Bt1. In this manner, the input pipepath for the raw gas Gm is formed using the gas pipe integrated block30.

An ozone gas output pipe for an ozone gas outputted from the ozonegenerator 1 and received by the ozone generator output part EX1 to beoutputted from the ozone gas output port 15 through the gas filter 51,the ozone concentration meter 5, the MFC 53, and the APC 4 is a pathformed by the ozone generator output part EX1, the pipe path R30 c, theinside of the gas filter mounting block 31, the gas filter 51, theinside of the gas filter mounting block 31, the pipe path R30 d, thein-block passage B5, the ozone concentration meter 5, the in-blockpassage B5, the pipe path R30 e, the in-block passage B53, the MFC 53,the in-block passage B4, the APC 4, the in-block passage B4, the pipepath R30 f, and the ozone gas output port 15 arranged in the mentionedorder. At this time, a region of the ozone generator 1 around the ozonegenerator output part EX1 is mounted to the gas pipe integrated block 30by the ozone generator mounting bolt Bt2. In this manner, the outputpipe path for the ozone gas is formed using the gas pipe integratedblock 30.

In the embodiment 6, the amount of the generated output ozone gas itselfis controlled by the MFC 53. This exerts an effect that the ozone-gasflow rate can be controlled so as to achieve an accurate output so thatthe amount of output ozone is accurately controlled.

It suffices that the raw gas supply port 14 is directly piped to the rawgas (input) pipe system, without the need of any pipe peripheralcomponent. In the ozone gas output pipe part, the gas filter 51, the MFC53, the ozone concentration meter 5, and the APC 4 are collectivelymounted to the gas pipe component. Therefore, an integrated pipeconfiguration is allowed only in the output gas pipe system. As aresult, the pipe is more compactified, and the number of components ofthe integrated pipe configuration can be reduced, which makes it easierto replace components.

(Other Aspects)

In another aspect of the ozone gas supply system according to theembodiment 6, similarly to the embodiment 4, the moisture removal filter59 having a function capable of trapping a small amount of moisturecontained in the raw gas that is supplied from the raw gas supply port14 may be added as shown in FIG. 17.

Additionally, similarly to the embodiment 5 shown in FIG. 13, aconfiguration (not shown) in which the moisture removal filters 59-1 to59-n are provided near the raw gas supply ports 14-1 to 14-n of theozone generation units 7-1 to 7-n may be adopted.

In this case, as shown in FIG. 18, the raw gas supply port 14 and themoisture removal filter 59 (any of the moisture removal filters 59-1 to59-n) are provided in series in the ozone generator input part ET1. Thatis, as shown in FIG. 18, there is obtained an ozone generation unit 7X4having a gas pipe integrated block structure in which the raw gas pipe(the raw gas supply port 14+the moisture removal filter 59) and theoutput gas pipe system (ozone gas output port 15) are integrated intothe gas pipe integrated block 30.

Embodiment 7 Basic Configuration: First Aspect

FIG. 19 is a block diagram showing a configuration of an ozone gassupply system according to an embodiment 7 (first aspect) of the presentinvention.

(Overall Configuration)

As shown in FIG. 19, an ozone gas supply system 104 has n (≧2) ozonegeneration units 7-1 to 7-n included therein, and has one gas filter 52shared by the ozone generation units 7-1 to 7-n. The gas filter 52 iscontrolled to remove a small amount of impurities or an impurity gascontained in the raw gas that is supplied from the raw gas supply port14 so that the purity of the raw gas is stabilized by the gas filter 52.The configuration and the operation are identical to those of the ozonegas supply system 101 of the embodiment 4 shown in FIG. 12 except thatthe gas filter 52 replaces the moisture removal filter 59. Therefore, adescription thereof is omitted as appropriate.

The ozone gas supply system 104 has the raw gas supply port 14. The rawgas is introduced from the outside into the ozone generation units 7-1to 7-n through the raw gas supply port 14, the gas filter 52, and theraw gas supply ports 14-1 to 14-n. That is, the gas filter 52 forremoving a small amount of impurities and an impurity gas contained inthe raw gas is provided at the raw gas supply port 14 that is an inletport for the external raw gas, and the gas filter 52 is controlled tostabilize the purity of the raw gas.

(Effects, etc.)

Accordingly, due to the gas filter 52 provided in the ozone gas supplysystem 104 of the embodiment 7, the impurities and the impurity gascontained in the raw gas supplied from the raw gas supply port 14 can bereduced. This can reduce the active gases generated together with theozone generation due to the moisture, the impurities, and the silentdischarge, such as the nitric acid cluster (HNO₃) gas, the OH radicalgas, the OH radical ion gas, and the HO₃ ⁺ ion gas. This canconsequently suppress wear or breakdown of the APC 4, the MFC 3, and theozone concentration meter 5 provided at the ozone gas output part of theozone generator 1, the gas opening/closing valve, and the ozonetreatment apparatuses 12-1 to 12-n, which may be otherwise caused by theactive gases such as the nitric acid ion cluster (HNO₃) gas, the OHradical gas, and the HO₃ ⁺ ion gas.

Moreover, a high-quality ozone gas containing a small amount of thenitric acid cluster (HNO₃), the OH radical gas, and the metalcontamination can be provided as the outputted ozone gas.

In this manner, in the ozone gas supply system 104 of the embodiment 7,the gas filter 52 is provided having the function capable of trappingimpurities and an impurity gas contained in the raw gas that is suppliedto the raw gas supply port 14. This exerts an effect that the impuritygas and the like contained in the raw gas supplied to the ozonegenerator 1 is reduced by the gas filter 52 to thereby achieve a supplyof a high-quality ozone gas.

Second Aspect of Embodiment 7

In a second aspect of the embodiment 7, similarly to the embodiment 2shown in FIGS. 8 and 9, each of the ozone power source 2 and the ozonegenerator 1 is downsized. Not only the compactified ozone power source 2having the means for supplying power and controlling the amount of powerand the compactified ozone generator 1 having the means for generatingthe ozone gas, but also the MFC 3 having the means for controlling theflow rate of the raw gas, the ozone gas filter 51 having the means forremoving impurities in the ozone gas, the ozone concentration meter 5having the means for detecting the output ozone gas concentration, andthe APC 4 having the means for controlling the gas pressure in the ozonegenerator to be a constant value, are assembled together and packaged,thereby achieving the ozone generation unit 7X serving as one unit in astructural sense, too.

(Compactification of Ozone Power Source 2)

In the embodiment 7, too, by adopting the circuit configuration of theembodiment 1 shown in FIG. 8, a circuit configuration compactified byintegrating main components of the ozone generator 1 and the ozone powersource 2 with each other, can be achieved.

(Combined Structure of Ozone Generation Unit)

In the embodiment 7, similarly to the embodiment 1 shown in FIG. 9, theozone generation unit 7X as one unit can be achieved in which the ozonegenerator 1, the ozone power source 2, the MFC 3, the gas filter 51, theozone concentration meter 5, the APC 4, and the gas pipe integratedblock 30 are assembled together.

Third Aspect of Embodiment 7

In a third aspect of the embodiment 7, similarly to the embodiment 3shown in FIGS. 10 and 11, the ozone generation unit 7 as one unit isfocused on, and downsizing of the ozone generation unit 7 in combinationwith the ozone gas output flow rate management unit 9 can be achieved.

(Control of Ozone Gas Output Flow Rate Management Unit)

The third aspect of the embodiment 7 can be achieved by adopting theozone gas supply system 20 of the embodiment 3 shown in FIG. 10 as aconfiguration corresponding to the ozone gas supply system 104 shown inFIG. 19.

(Combined Structure of Ozone Generation Unit)

The third aspect of the embodiment 7 can be achieved by configuring eachof the ozone generation units 7-1 to 7-n of the ozone gas supply system104 as the ozone generation unit 7Y of the embodiment 3 shown in FIG.11.

Embodiment 8

FIG. 20 is a block diagram showing a configuration of an ozone gassupply system according to an embodiment 8 of the present invention.

In an ozone gas supply system 105 of the embodiment 8, similarly to theozone gas supply system 104 of the embodiment 7, gas filters 52-1 to52-n (for the raw-gas) are provided for the purpose of trappingimpurities and an impurity gas contained in the raw gas that is suppliedthrough the raw gas supply port 14 into the configuration of the ozonegas supply system 105. However, the gas filters 52-1 to 52-n areprovided in one-to-one correspondence with the ozone generation units7-1 to 7-n, and provided near the inlet portions of the raw gas supplyparts of the ozone generation units 7-1 to 7-n, respectively. Each ofthe gas filters 52-1 to 52-n increases the purity of the raw gassupplied to each of the ozone generation units 7-1 to 7-n, so that thepurity of the ozone gas generated in the ozone gas supply system 105 isincreased.

Particularly, in the ozone generation units 7-1 to 7-n of the embodiment8, similarly to the embodiment 2, the gas filter 52 for trappingimpurities and an impurity gas contained in the gas is mounted to theraw gas inlet portion of one unit of the ozone generation unit 7, anddownsizing of the ozone generation unit 7 is achieved by the combinedstructure.

(Raw Gas Purity Management)

FIG. 21 is a perspective view schematically showing a combined structureof an ozone generation unit 7X5 as one unit according to the embodiment8.

As shown in FIGS. 20 and 21, the gas filter 52 (52-1 to 52-n) is mountedat a position that allows easy replacement and in connection with theraw gas supply ports 14-1 to 14-n of the ozone generation units 7-1 to7-n, and integrally formed. In the following, for convenience of thedescription, a case of n=3 will be described as an example, withreference to FIG. 20.

FIG. 26 is an explanatory diagram showing the relationship between thedew point of the raw gas and the moisture content in the raw gas. As theraw gas supplied to the ozone gas supply system 104, in general, a rawgas having a high purity of 99.99% or more is used. This high-purity rawgas contains an impurity gas of about 0.1 to a few PPM, other than theraw gas, such as a nitrogen-based gas, a carbon-based gas, and a sulfidegas. The high-purity raw gas also contains a moisture of one to a fewPPM (see FIG. 26).

As the raw gas supplied to the ozone gas supply system 105, in general,a raw gas having a high purity of 99.99% or more is used. Thishigh-purity raw gas contains an impurity gas of about 0.1 to a few PPM,other than the raw gas, such as a nitrogen-based gas, a carbon-basedgas, and a sulfide gas. The high-purity raw gas also contains a moistureof one to a few PPM. Additionally, these impurity gas and moisture arecontained in the air, too. Therefore, when a part of the pipes in theraw gas pipe path is opened to the air, a moisture and an impurity gassuch as a nitrogen gas immediately adsorb to a pipe surface. If the rawgas flows in the raw gas pipe to which the impurity gas adsorbs, notonly the impurity gas and the moisture contained in the high-purity rawgas but also the impurity gas adhering to the pipe are separated by thegas flow, which may lower the purity of the supplied raw gas.

If a moisture or an impurity gas such as a nitrogen-based gas, acarbon-based gas, or a sulfide gas is contained in the raw gas, not onlythe ozone gas but also N radical and OH radical gases are generated bydischarging. These radical gases are combined with the moisture, thusoutputting the ozone gas that contains cluster molecule gases of nitricacid and hydrogen peroxide water.

Since these cluster molecule gases of nitric acid and hydrogen peroxidewater are very active gases, a chemical reaction occurs on a metalsurface of the ozone-gas output gas pipe, the valve, or the like, tocause corrosion of the pipe surface. This may cause a corroded-metalimpurity (metal contamination) to be contained in the output ozone gas.

Increase in the amount of the metal impurity (metal contamination)contained in the output ozone gas deteriorates the performance of anoxide film that is formed on a semiconductor by an oxide film processusing the ozone gas.

From the above, it has been confirmed from tests that the quality of anoutput ozone gas is deteriorated if an impurity gas or a moisture iscontained in the raw gas. Accordingly, the gas filter for the purpose oftrapping the impurity gas is mounted to a raw gas supply portion.Particularly, in the embodiment 8, at the raw gas supply ports 14-1 to14-n of the ozone generation units 7-1 to 7-n, the gas filters 52-1 to52-n are mounted at positions that allow easy replacement, to remove theimpurity gas.

In this configuration, one gas filter 52-1 to 52-n is provided. However,depending on a type of the impurity gas, a plurality of gas filters maybe provided in series and at multiple stages, or an impurity gas filterand a moisture trapping gas filter may be provided in series and atmultiple stages.

The other parts, pipe paths, and the like, of the configuration areidentical to those of the ozone generation unit 7X2 shown in FIG. 14,except that the gas filter 52 replaces the moisture removal filter 59.Therefore, a description thereof is omitted.

As shown in FIG. 21, a raw gas pipe system (the raw gas supply port14+the gas filter 52) and an output gas pipe system (ozone gas outputport 15) are integrated into a gas pipe integrated block 30 as a gaspipe integrated block structure. Thereby, the ozone generator 1, theozone power source 2, and the gas pipe systems are packaged, and thusthe ozone generation unit 7X5 can be further downsized. The raw gassupply port 14 and the gas filter 52 are coupled to each other.

Similarly to the embodiment 8, at the raw gas supply port 14 provided ata rear surface of the ozone generation units 7-1 to 7-n, the gas filter52 (gas filters 52-1 to 52-n) is mounted at a position that allows easyreplacement. As a result, the ozone gas having a higher purity isprovided, and additionally, the mounted gas filter 52 can remove theimpurity gas. This exerts an effect that a time for flowing a purge gasprior to the ozone gas generation can be considerably shortened.

Other Aspects of Embodiment 6 Relating to Embodiments 7 and 8

In another aspect of the ozone gas supply system according to theembodiment 6, similarly to the embodiment 7, the gas filter 52 having afunction capable of trapping impurities contained in the raw gas that issupplied from the raw gas supply port 14 may be added as shown in FIG.22.

Additionally, similarly to the embodiment 8 shown in FIG. 20, aconfiguration (not shown) in which the gas filters 52-1 to 52-n areprovided near the raw gas supply ports 14-1 to 14-n of the ozonegeneration units 7-1 to 7-n may be adopted.

In this case, as shown in FIG. 23, the raw gas supply port 14 and thegas filter 52 (any of the gas filters 52-1 to 52-n) are provided inseries in the ozone generator input part ET1. That is, as shown in FIG.23, there is obtained an ozone generation unit 7X6 having a gas pipeintegrated block structure in which the raw gas pipe (the raw gas supplyport 14+the gas filter 52) and the output gas pipe system (ozone gasoutput port 15) are integrated into the gas pipe integrated block 30.

<Others>

In the embodiments 1 to 8 above, the description has been give to thesystem for supplying the ozone gas with a predetermined ozone flow rateand a predetermined ozone concentration in an ozone-gas multi-processingapparatus for use in a semiconductor manufacturing apparatus thatrequires an ozone treatment apparatus capable of generating aboutseveral tens to 500 g/h ozone.

Instead of the ozone treatment apparatus 12 described above, anozone-bleaching apparatus for pulp, an ozone treatment apparatus forpool water, an ozone treatment apparatus for clean and sewage water, andan ozone treatment apparatus for a chemical plant, which require alarger amount of ozone gas, may be adopted. For example, in a case of aprocessing apparatus that requires one to several kg/h ozone gas, aplurality of ozone generation units 7-1 to 7-n are installed in theozone gas supply system 10 (20, 101 to 105) described above, and outputozone gases of the ozone generation units 7-1 to 7-n are collectivelysupplied to one ozone treatment apparatus. This exerts an effect that itis relatively low-cost and easy and provides excellent maintainability,and therefore the field of application of the ozone gas supply system isexpanded.

While the invention has been described in detail, the foregoingdescription is in all aspects illustrative and not restrictive. It willbe appreciated that numerous modifications unillustrated herein can bemade without departing from the scope of the present invention.

INDUSTRIAL APPLICABILITY

The present invention relates to an ozone generation unit with afunction having a plurality of means for supplying an ozone gas, and anozone gas supply system for supplying the ozone gas to a plurality ofozone treatment apparatuses. An object of the present invention is toachieve downsizing of the ozone generation unit with a function having aplurality of means for outputting an ozone gas.

However, also in a gas generation unit for a gas other than the ozonegas and a gas supply system for supplying the generated gas other thanthe ozone gas to a plurality of gas processing apparatuses, the qualityof the gas generated by a generator can be improved at a time ofoutputting the gas, by mounting the moisture removal filter 59 forremoving a moisture contained in a raw gas or the gas filter 52 forremoving an impurity gas contained in the raw gas.

Further, it is preferable to integrate and downsize a gas generator unitwith a function having a plurality of means for outputting a gas, andbuild a gas generation system having a plurality of gas generation unitsinstalled therein.

The invention claimed is:
 1. An ozone generation unit, comprising: anozone generator for generating an ozone gas; an ozone power source forcontrolling power to be supplied to the ozone generator; a controllerassociated with the ozone generator; a raw gas supply port for supplyinga raw gas from the outside to the ozone generator; an ozone gas outputport for outputting, to the outside, the ozone gas obtained from theozone generator through at least part of the controller; cooling waterinlet/outlet ports for supplying and discharging a cooling waterobtained from the outside to the ozone generator; and a gas pipeintegrated block, wherein the ozone generation unit is formed as anintegrated structure in which the ozone generator, the ozone powersource, the controller, the raw gas supply port, the ozone gas outputport, and the cooling water inlet/outlet ports are assembled together,the controller comprises: a flow-rate-detector/flow-rate-adjustorcomprising a mass flow controller (MFC) for controlling a flow rate ofthe raw gas inputted to the ozone generator; a gas filter for processingthe ozone gas outputted from the ozone generator to remove an impurityand a foreign substance; a pressure-detector/pressure-adjustorcomprising an automatic pressure controller (APC) for automaticallycontrolling internal pressure of the ozone generator; and ozoneconcentration detector comprising an ozone concentration meter fordetecting an ozone concentration value of the ozone gas outputted fromthe ozone generator, each of the ozone generator, theflow-rate-detector/flow-rate-adjustor, the gas filter, thepressure-detector/pressure-adjustor, the ozone concentration detector,the raw gas supply port, the ozone gas output port, and the coolingwater inlet/outlet ports is mounted to the gas pipe integrated block inclose contact, the gas pipe integrated block has a three-dimensionalstructure, the flow-rate-detector/flow-rate-adjustor, the gas filter,the pressure-detector/pressure-adjustor, and the ozone concentrationdetector are arranged on one or more surfaces of the gas pipe integratedblock, the gas pipe integrated block has a plurality of internal pipepaths, the plurality of internal pipe paths are connected to the ozonegenerator, the flow-rate-detector/flow-rate-adjustor, the gas filter,the pressure-detector/pressure-adjustor, the ozone concentrationdetector, the raw gas supply port, and the ozone gas output port, toform a raw gas input pipe path and an ozone gas output pipe path, theraw gas input pipe path extends from the raw gas supply port through theflow-rate-detector/flow-rate-adjustor to the ozone generator, and theozone gas output pipe path extends from the ozone generator through thegas filter, the ozone concentration detector, and thepressure-detector/pressure-adjustor, to the ozone gas output port. 2.The ozone generation unit of claim 1, further comprising an ozonecontrol part for performing an initial operation of the ozone powersource in which the ozone power source is driven with a predeterminedset power amount, and after the elapse of a predetermined time period,performing a PID control on the power supplied by the ozone power sourcebased on comparison between an ozone concentration detected by the ozoneconcentration meter and a desired ozone concentration.
 3. An ozone gassupply system, comprising: a plurality of ozone generation units, eachof the plurality of ozone generation units comprises the ozonegeneration unit of claim 1; an ozone gas output flow rate managementunit configured to receive a plurality of ozone gas outputs from aplurality of the ozone generators in the plurality of ozone generationunits, and be capable of performing an ozone gas output flow ratecontrol for selectively outputting one or a combination of two or moreof the plurality of ozone gas outputs to any of a plurality of ozonetreatment apparatuses by opening/closing operation of a plurality ofozone gas control valves provided in the ozone gas output flow ratemanagement unit; and a system collective management unit for, based on aprocess ozone gas event signal supplied from the plurality of ozonetreatment apparatuses, controlling the ozone gas output of each of theplurality of ozone generation units and causing the ozone gas outputflow rate management unit to control the ozone gas output flow rate. 4.The ozone gas supply system of claim 3, wherein the plurality of ozonegas control valves comprise an electrically-operated valve or apneumatic valve that is openable and closable by electricity or airpressure, and the system collective management unit outputs the controlsignal such that an ozone flow rate and an ozone concentration of theozone gas supplied to each of the plurality of ozone treatmentapparatuses have desired values.
 5. The ozone gas supply system of claim3, wherein the ozone gas output flow rate management unit furthercomprises a plurality of ozone gas control valve accommodation partscorresponding to the plurality of ozone gas control valves, each of theplurality of ozone gas control valves is provided in each correspondingone of the ozone gas control valve accommodation parts, and each of theplurality of ozone gas control valve accommodation parts is mounted intight contact with the gas pipe integrated block of each correspondingone of the ozone generation units, and is interposed on the ozone gasoutput pipe path.
 6. The ozone generation unit of claim 1, wherein theozone generation unit is suitable for supplying an ozone gas to an ozonetreatment apparatus with a predetermined supply flow rate and apredetermined concentration.
 7. The ozone gas supply system of claim 3,wherein the ozone gas supply system is suitable for supplying an ozonegas to the plurality of ozone treatment apparatuses with a predeterminedsupply flow rate and a predetermined concentration.
 8. An ozonegeneration unit, comprising: an ozone generator for generating an ozonegas; an ozone power source for controlling power to be supplied to theozone generator; a controller associated with the ozone generator; a rawgas supply port for supplying a raw gas from the outside to the ozonegenerator; an ozone gas output port for outputting, to the outside, theozone gas obtained from the ozone generator through at least part of thecontroller; cooling water inlet/outlet ports for supplying anddischarging a cooling water obtained from the outside to the ozonegenerator; and a gas pipe integrated block, wherein the ozone generationunit is formed as an integrated structure in which the ozone generator,the ozone power source, the controller, the raw gas supply port, theozone gas output port, and the cooling water inlet/outlet ports areassembled together, the controller comprises: aflow-rate-detector/flow-rate-adjustor comprising a mass flow controller(MFC) for controlling a flow rate of the ozone gas that is outputtedfrom the ozone generator; a gas filter for processing the ozone gasoutputted from the ozone generator to remove an impurity and a foreignsubstance; a pressure-detector/pressure-adjustor comprising an automaticpressure controller (APC) for automatically controlling internalpressure of the ozone generator; and ozone concentration detectorcomprising an ozone concentration meter for detecting an ozoneconcentration value of the ozone gas outputted from the ozone generator,each of the ozone generator, the flow-rate-detector/flow-rate-adjustor,the gas filter, the pressure-detector/pressure-adjustor, the ozoneconcentration detector, the raw gas supply port, the ozone gas outputport, and the cooling water inlet/outlet ports is mounted to the gaspipe integrated block in close contact, the gas pipe integrated blockhas a three-dimensional structure, theflow-rate-detector/flow-rate-adjustor, the gas filter, thepressure-detector/pressure-adjustor, and the ozone concentrationdetector are arranged on one or more surfaces of the gas pipe integratedblock, the gas pipe integrated block has a plurality of internal pipepaths, the plurality of internal pipe paths are connected to the ozonegenerator, the flow-rate-detector/flow-rate-adjustor, the gas filtermeans, the pressure-detector/pressure-adjustor, the ozone concentrationdetector, the raw gas supply port, and the ozone gas output port, toform a raw gas input pipe path and an ozone gas output pipe path, theraw gas input pipe path extends from the raw gas supply port to theozone generator, the ozone gas output pipe path extends from the ozonegenerator through the gas filter, the ozone concentration detector, theflow-rate-detector/flow-rate-adjustor, and thepressure-detector/pressure-adjustor, to the ozone gas output port. 9.The ozone generation unit of claim 8, wherein the ozone generation unitis suitable for supplying an ozone gas to an ozone treatment apparatuswith a predetermined supply flow rate and a predetermined concentration.10. The ozone generation unit of claim 8, further comprising an ozonecontrol part for performing an initial operation of the ozone powersource in which the ozone power source is driven with a predeterminedset power amount, and after the elapse of a predetermined time period,performing a PID control on the power supplied by the ozone power sourcebased on comparison between an ozone concentration detected by the ozoneconcentration meter and a desired ozone concentration.
 11. An ozone gassupply system, comprising: a plurality of ozone generation units, eachof the plurality of ozone generation units comprises the ozonegeneration unit of claim 8; an ozone gas output flow rate managementunit configured to receive a plurality of ozone gas outputs from aplurality of the ozone generators in the plurality of ozone generationunits, and be capable of performing an ozone gas output flow ratecontrol for selectively outputting one or a combination of two or moreof the plurality of ozone gas outputs to any of a plurality of ozonetreatment apparatuses by opening/closing operation of a plurality ofozone gas control valves provided in the ozone gas output flow ratemanagement unit; and a system collective management unit for, based on aprocess ozone gas event signal supplied from the plurality of ozonetreatment apparatuses, controlling the ozone gas output of each of theplurality of ozone generation units and causing the ozone gas outputflow rate management unit to control the ozone gas output flow rate. 12.The ozone gas supply system of claim 11, wherein the plurality of ozonegas control valves comprise an electrically-operated valve or apneumatic valve that is openable and closable by electricity or airpressure, and the system collective management unit outputs the controlsignal such that an ozone flow rate and an ozone concentration of theozone gas supplied to each of the plurality of ozone treatmentapparatuses have desired values.
 13. The ozone gas supply system ofclaim 11, wherein the ozone gas output flow rate management unit furthercomprises a plurality of ozone gas control valve accommodation partscorresponding to the plurality of ozone gas control valves, each of theplurality of ozone gas control valves is provided in each correspondingone of the ozone gas control valve accommodation parts, and each of theplurality of ozone gas control valve accommodation parts is mounted intight contact with the gas pipe integrated block of each correspondingone of the ozone generation units, and is interposed on the ozone gasoutput pipe path.
 14. The ozone gas supply system of claim 11, whereinthe ozone gas supply system is suitable for supplying an ozone gas tothe plurality of ozone treatment apparatuses with a predetermined supplyflow rate and a predetermined concentration.